Ultra-thin decoupled plasma nitridation (DPN) oxynitride gate ...
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- 1Ultra-thin decoupled plasma nitridation (DPN) oxynitride gate ...
Ultra-thin decoupled plasma nitridation (DPN) oxynitride gate dielectric for 80-nm advanced techn...
- 2Ultrathin decoupled plasma nitridation SiON gate dielectrics ...
Decoupled plasma nitridation (DPN) SiON films for short channel complementary metal-oxide-semicon...
- 3(PDF) Plasma nitridation of very thin gate dielectrics
Specifically, remote plasma nitridation (RPN) and decoupled plasma nitridation (DPN) of 1.4 nm ba...
- 4Mechanism of Silicon Dioxide Decoupled Plasma Nitridation ...
Results show that neutral N atoms and N2+ ions are the primary agents responsible for dielectric ...
- 5Optimization of annealing process of pulsed RF decoupled ...
Optimization of post nitridation annealing (PNA) in plasma nitrided gate oxide integration exhibi...