(PDF) Plasma nitridation of very thin gate dielectrics
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HomePhysicalMetallurgyAnnealingMetallurgyEngineeringMaterialsEngineeringMetalProcessingPlasmaNitridingArticlePDFAvailablePlasmanitridationofverythingatedielectricsNovember2001MicroelectronicEngineering59(1):317-322DOI:10.1016/S0167-9317(01)00616-5Authors:H.NAl-ShareefGennadiBer
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