Advanced Transistor Process Technology from 22- to 14-nm ...
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Especially, the material choice, film stack design, and process flow integration ... with traditional planar 2D transistor for 14-nm 3D FinFET are summarized. ... and widely adopted by other IC manufacturing corporations including TSMC, and ... Openaccesspeer-reviewedchapterAd
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Especially, the material choice, film stack design, and process flow integration ... with traditi...
