Atomic layer etching

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有關 Atomic layer etching?tw 的學術文章scholar.google.com › citations圖片全部顯示Plasma-enhanced atomic layer deposition and etching of high-k ...Atomic layer deposition (ALD) of high-quality gadolinium oxide thin films is achieved ... V. M. Donnelly, F. P. Klemens, T. W. Sorsch, G. L. Timp, and F. H. ...Transient behavior in quasi-atomic layer etching of silicon dioxideThe mechanism for atomic layer etching (ALE) typically consists of two sequential self-limited half-reactions—passivation and ion bombardment—which provide ... | Isotropic Atomic Layer Etching of ZnO Using ... - ACS Publications2018年10月4日 · Atomic layer etching (ALE) provides Ångström-level control over material removal and holds potential for addressing the challenges in ...[PDF] Thermal Atomic Layer Etching of ZnO by a “Conversion-Etch ...2017年1月5日 · Atomic force microscopy. (AFM) measurements observed that the ZnO ALD films were smoothed by ZnO ALE. The conversion-etch mechanism may occur ...[PDF] Atomic Layer Etching of Metal Oxides - CU Scholar5 Atomic Layer Etching of Al2O3 Using Sequential, Self-Limiting Thermal ... Park, S. D.; Oh, C. K.; Bae, J. W.; Yeom, G. Y.; Kim, T. W.; Song, J. I.; Jang, ...Plasma-enhanced atomic layer deposition and etching of high-k ...PDF | Atomic layer deposition (ALD) of high-quality gadolinium oxide thin films ... V. M. Donnelly, F. P. Klemens, T. W. Sorsch, G. L. Timp, and F. H. Bau-.(PDF) Achieving ultrahigh etching selectivity of SiO 2 over Si 3 N 4 ...Fluorocarbon based atomic layer etching of Si3N4 and etching selectivity of ... Predicting synergy in atomic layer etching ... andisbrieflydescribedhere.Flex Product Family - Lam ResearchAtomic Layer Etch (ALE) Reactive Ion Etch (RIE) ... Dielectric etch carves patterns in insulating materials to create barriers between the electrically ...Isotropic Atomic Layer Etching of ZnO Using Acetylacetone ... - NCBI2018年11月7日 · The process concept is inspired by the use of Sn(acac)2 in thermal ALE and β-diketones in organic vapor-phase etching. ALD-grown polycrystalline ...