TWI620228B - 電漿處理裝置與電漿處理方法 - Google Patents

舉例來說，使用惰性氣體的電漿清除試片的表面官能基，會遺留大量的空懸鍵(dangling bond)，所以再返回到大氣環境就會吸附氧或水氣，使試片表面轉變為親水性；然而經 ... TWI620228B-電漿處理裝置與電漿處理方法 -GooglePatents 電漿處理裝置與電漿處理方法 DownloadPDF Info Publicationnumber TWI620228B TWI620228B TW105143813A TW105143813A TWI620228B TWI620228B TWI620228B TWI620228B TW105143813A TW105143813A TW105143813A TW105143813A TW105143813A TW105143813A TWI620228B TWI620228B TWI620228B Authority TW Taiwan Priorartkeywords plasma item testpiece processing application Priorartdate 2016-12-29 Applicationnumber TW105143813A Otherlanguages English(en) Otherversions TW201824332A (zh Inventor 謝宏元 OriginalAssignee 財團法人工業技術研究院 Prioritydate(Theprioritydateisanassumptionandisnotalegalconclusion.Googlehasnotperformedalegalanalysisandmakesnorepresentationastotheaccuracyofthedatelisted.) 2016-12-29 Filingdate 2016-12-29 Publicationdate 2018-04-01 2016-12-29 Applicationfiledby財團法人工業技術研究院 filed Critical 財團法人工業技術研究院 2016-12-29 PrioritytoTW105143813A priority Critical patent/TWI620228B/zh 2018-04-01 Applicationgranted granted Critical 2018-04-01 PublicationofTWI620228B publication Critical patent/TWI620228B/zh 2018-07-01 PublicationofTW201824332A publication Critical patent/TW201824332A/zh Links Espacenet GlobalDossier Discuss 238000009832 plasmatreatment Methods 0.000 title claims description 20 210000002381 Plasma Anatomy 0.000 claims abstract description 202 230000003287 optical Effects 0.000 claims abstract description 38 239000000725 suspension Substances 0.000 claims abstract description 25 238000003672 processingmethod Methods 0.000 claims abstract description 15 239000007789 gas Substances 0.000 claims description 37 239000000758 substrate Substances 0.000 claims description 31 230000005684 electricfield Effects 0.000 claims description 29 239000011248 coatingagent Substances 0.000 claims description 25 238000000576 coatingmethod Methods 0.000 claims description 25 XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances 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C23C18/00—Chemicalcoatingbydecompositionofeitherliquidcompoundsorsolutionsofthecoatingformingcompounds,withoutleavingreactionproductsofsurfacematerialinthecoating;Contactplating C23C18/16—Chemicalcoatingbydecompositionofeitherliquidcompoundsorsolutionsofthecoatingformingcompounds,withoutleavingreactionproductsofsurfacematerialinthecoating;Contactplatingbyreductionorsubstitution,e.g.electrolessplating C23C18/31—Coatingwithmetals C23C18/38—Coatingwithcopper Abstract 一種電漿處理裝置與電漿處理方法，所述裝置包括一腔體、一平面電漿產生電極、一試片懸吊夾持系統以及一光學觀測系統。

所述腔體定義出一處理內腔，且腔體的頂部具有一視窗。

平面電漿產生電極則位於所述處理內腔內，用以產生平面電漿。

試片懸吊夾持系統於所述處理內腔內相對平面電漿產生電極配置，用以懸吊夾持一試片。

而光學觀測系統是位於試片懸吊夾持系統旁的處理內腔內，以透過所述腔體的視窗測量平面電漿有效影響區的厚度範圍。

Description 電漿處理裝置與電漿處理方法 本發明是有關於一種電漿處理技術，且特別是有關於一種電漿處理裝置與電漿處理方法。

非導體的金屬化通常需要在非導體的表面上植佈金屬觸媒，透過金屬觸媒在無電鍍(化學鍍)鍍液中觸發金屬還原在觸媒所在的位置上。

一般使用的觸媒如錫鈀(Sn-Pd)膠體無法附著在疏水的表面上，因此待鍍的基板需進行化學親水性處理的操作：如玻璃基板需在強酸中的徹底清洗，或是高分子基板需在苛性鈉的高溫溶液之中經長時間的浸泡。

這些過程非但耗時且繁瑣，而且強酸強鹼具有危險性，安全起見必須要在煙櫃中才能進行操作。

以電漿對表面進行親疏水特性的改質是相當有效的方式，最常見的是以電容耦合型電漿(CapacitanceCoupledPlasma,CCP)的型式，將試片涵浸在立體空間放電腔之中，但是由於反應腔處理的空間大，需要長時間才能產生足夠的負壓，故而浪費較多在非處理相關的能源消耗，同時對處理面不具備選擇性。

另一種方式是平行板式的CCP，其中試片是夾在兩平行電極板之間形成三明治的機構。

然而，以上的作法均使得電漿的轟擊(bombardment)直接作用在試片表面上，雖然可選擇處理面，但垂直的擺設使得反應腔的空間仍然很大，而且電漿的轟擊過於直接，同時也造成試片的表面有物理性侵蝕(etching)或非設計導入之粗糙化的現象，而不能用於特定的應用。

如果要進一步在化學鍍中實現圖案化則需要解決如何將觸媒圖案化的問題。

減去法(如以膠帶進行遮蔽)是快速的解法，然而膠帶一來不堪鹼性溶液的長時間浸泡，二來稍微精細一點的圖案化即無法勝任，因此發展在常溫下能快速對物體表面進行有效改質(官能基修飾)的技術便顯得相當地重要。

本發明提供一種電漿處理裝置，能產生平面電漿的同時量測該平面電漿的有效影響範圍，而達到快速對物體表面進行有效改質(官能基修飾)的技術，同時兼具節約時間與資源的功效。

本發明提供一種電漿處理方法，能常溫下達到表面親疏水性改質，同時兼具快速及節約時間與資源的功效，且可達到有親疏水特性差異化的圖案(patterning)效果。

本發明的電漿處理裝置，包括一腔體、一平面電漿產生電極、一試片懸吊夾持系統以及一光學觀測系統。

所述腔體定義出一處理內腔，且腔體的頂部具有一視窗。

平面電漿產生電極則位於所述的處理內腔內，用以產生平面電漿。

試片懸吊夾持系統於所述處理內腔內相對平面電漿產生電極配置，用以懸吊夾持一試片。

而光學觀測系統是位於試片懸吊夾持系統旁的處理內腔內，以透過所述腔體的視窗測量平面電漿之有效影響區的厚度範圍。

本發明的電漿處理方法，包括在一電漿處理腔體內產生一平面電漿，觀測視窗以取得平面電漿的有效影響區，以取得所述有效影響區的位置及厚度資訊。

調整一試片的位置至前述有效影響區內，以對試片進行電漿處理。

基於上述，本發明使用共平面介電被覆放電(coplanardielectricbarrierdischarge)的型式產生平面電漿，在適當的緩衝氣體條件(氣體種類、供氣壓力、流量)作用下，在距離共平面電極之上存在一個適當的反應影響區範圍，可對位於該範圍面向電極的表面產生快速有效的修飾作用：例如清洗、接枝等反應。

利用這項特性可有效地對該表面進行親疏水性的改質。

因此本發明有別於一般將處理基板整片涵浸(immerse)在氣體電漿之中，而可選擇處理面，或加上遮罩僅對部份區域進行改質，創造出有圖案差異化的親疏水特性，對於電漿能量的利用也會更有效。

為讓本發明的上述特徵和優點能更明顯易懂，下文特舉實施例，並配合所附圖式作詳細說明如下。

圖1是依照本發明的第一實施例的一種電漿處理裝置的示意圖。

請參照圖1，第一實施例的電漿處理裝置100包括一腔體102、平面電漿產生電極104、一試片懸吊夾持系統106以及一光學觀測系統108。

腔體102定義出一處理內腔110，且腔體102的頂部具有一視窗112。

平面電漿產生電極104位於處理內腔110內，用以產生平面電漿的有效影響區114，且平面電漿產生電極104可如圖嵌入一絕緣基板115之中，或者形成於絕緣基板115之上且高出於絕緣基板115表面。

而且，平面電漿產生電極104可製作成等於、或大於試片116範圍，以進行全面性的處理；亦可製作成小於試片116的各種幾何形狀，而僅針對試片116的特定連續性的範圍進行處理。

試片懸吊夾持系統106於處理內腔110內相對於平面電漿產生電極104配置，用以懸吊夾持一試片116。

而光學觀測系統108是位於試片懸吊夾持系統106旁的處理內腔110內，以透過腔體102的視窗112測量平面電漿的有效影響區114在厚度方向(z方向)的範圍H1(如圖1所示)。

光學觀測系統108可在平面電漿產生電極104以上約20mm範圍內移動，可作歸零並帶有測定(或兼顯示與記錄)垂直距離的功能。

上述光學觀測系統108與試片懸吊夾持系統106可為連動或是不連動。

舉例來說，光學觀測系統108可具有一觀測鏡片118和連接觀測鏡片118的可調式懸吊件120；試片懸吊夾持系統106可具有一夾持件122和連接夾持件122的另一可調式懸吊件124，因此藉由單獨控制(手動或電動)可調式懸吊件120或124，能使光學觀測系統108與試片懸吊夾持系統106不連動；同時控制可調式懸吊件120和124，即可使光學觀測系統108與試片懸吊夾持系統106連動。

在不連動的狀況下，光學觀測系統108是用於測量平面電漿的有效影響區114之厚度H1範圍的上、下限，並不能用於即時性的確認觀察。

而另一方面，在連動的狀況下，光學觀測系統108則可在處理過程中即時性的確認觀察試片是否位於平面電漿的有效影響區114厚度H1的上、下限之間。

此外，光學觀測系統108還可搭配有相對視窗112配置於腔體102外的一數位攝影裝置(如CCD)以及位於視窗用以傳遞光訊號至外部分析設備(未繪示)的一光纖感測器128。

至於平面電漿的範圍區分將詳述於下。

首先，平面電漿的產生可分為電感耦合電漿(InductanceCoupledPlasma,ICP)及電容耦合電漿(CapacitanceCoupledPlasma,CCP)兩種型式，不論產生的方式如何，均適用於物體表面(特別指的是平面，flatsurface)的處理，譬如親疏水性的改質。

電感耦合電漿(ICP)可使用單一連續性的平面電漿產生電極104。

由於圖1顯示的是電漿處理裝置100的剖面，所以平面電漿產生電極104彼此分隔，但實際上可為單一連續性的電極。

藉由平面電漿產生電極104所提供之耦合感應電場加速內容之自由電子，激發處理內腔110內之低壓狀態下的氣體並使之產生靜電(electrostatic)耦合的放電(Edischarge)形成平面電漿，同時提升了自由電子的密度，當自由電子的密度達到某一臨界點，放電反應會轉由電磁(electromagnetic)耦合的放電(Hdischarge)效應所主宰，感應電場呈同方向之一渦漩型態加速電子運動，進一步加速放電現象並放出大量的電子。

出現在平面電漿產生電極104上的電漿可大致劃分為無效的電漿鞘(plasmasheath)以及有效影響區(affectedzone)114兩段，所以圖1中所標示之114即為平面電漿的有效影響區，區域而該有效影響區範圍的厚度即為圖1之H1所示，超出有效影響區以外，因無足量的激發電子足以維持電漿的平衡，故為「無效」的區域。

所謂的無效區域包括上述電漿鞘與有效影響區上方的「電漿外(beyondplasma)」區域。

平面電漿產生電極104例如方形迴圈(loop)、圓形迴圈等結構，但本發明並不限於此，亦可為U型線、蛇形線、S型線、或多線並聯等，能藉以產生電感耦合電漿之各種變化型態。

本實施例中的電漿處理裝置100可以處理相對於平面電漿產生電極104之線圈較大或者較小的試片116：即電極承載板上的能量傳輸線圈可製作成等於、或大於處理試片範圍，以進行全面性的處理，亦可製作成小於處理試片的各種幾何形狀，而僅針對試片的特定連續性的範圍進行改質處理。

平面電漿產生電極104的材質例如銅金屬、燒結銀膠厚膜、燒結Pd膠厚膜、或如銦錫氧化物(ITO)之透明導電氧化物，其內各線段間例如具有介於0.1mm~5.0mm之間距P以及約介於0.1mm~10mm之線寬W，然本發明並不限於此。

而電容耦合電漿(CCP)則是藉由平面電漿產生電極104的陰陽兩端所提供之耦合感應電場加速內容之自由電子，在兩平行電極之間快速來回震盪，激發處理內腔110內之低壓狀態下的氣體並使之產生靜電耦合的放電形成平面電漿114，同時提升了自由電子的密度。

在本實施例中是將兩平行電極安排在同一平面上，則形成共平面放電(coplanardischarge)的型式。

出現在平面電漿產生電極104上的電漿可大致劃分為無效的電漿鞘以及有效影響區兩段，所以圖1中的平面電漿的H1範圍就是「有效影響區」114的厚度，超出有效影響區以外的電漿鞘與「電漿外」區域，因無足量的激發電子足以維持電漿的平衡，故為「無效」的區域。

平面電漿產生電極104例如指梳狀電極且具有歸屬相反的極性之結構。

平面電漿產生電極104的材質例如銅金屬、燒結銀膠厚膜、燒結鈀膠厚膜、或如銦錫氧化物之透明導電氧化物，其例如具有約介於0.1mm~5mm之線寬W且其平面電漿產生電極線的間距P約介於0.05mm~25mm，然本發明並不限於此。

平面電漿產生電極104上如被覆有介電材料(dielectricbarrier)，可降低游絲放電(filamentdischarge)的形成，有助於放電能量在平面上的均勻分佈，因此圖中位在腔體102之外的絕緣基板115可視同與絕緣基板115為一體的介電阻障層，而兼具上述功效。

平面電漿產生電極104上之介電材料的厚度t與電極線的間距P的比例也會對於電漿密度的分佈造成影響；舉例來說，低於某一厚度(如t＜5µm或t/P＜＜1)的介電被覆，會使得電漿密度較為集中在兩極的中線或電極線的正上方；介電被覆超過某個厚度(如t＞100µm或t/P~1)，電漿密度則會趨近於平坦化。

上述電漿的激發一般是由平面電漿產生電極104耦接於高頻震盪裝置(未繪示)，例如是聲頻(audiofrequency)、射頻(radiofrequency)、或微波(microwavefrequency)及對應之阻抗匹配器(impedancematching)，於操作時提供平面電漿產生電極104的交流頻率譬如在1KHz~2.45GHz之射頻脈波，較佳地為介於5KHz~20MHz之射頻脈波，可以是直流電脈衝(DCpulses)亦或是交流電脈衝(ACpulses)。

另外在本發明之一實施例中，可藉由控制處理內腔110的壓力改變平面電漿有效影響區114所在的高程位置(如圖1之114與電極104間的空隙間距)以及其厚度H1，且愈是緊縮型(condensed)的電漿(通常發生在較低的真空度下)，電漿鞘愈薄且愈接近平面電漿產生電極104表面。

因此平面電漿可以藉由壓力的調節放大或縮小其處理範圍，從而在不同的距離(如圖1的試片116與電極104間的空隙間距)展現不同的效能。

上述壓力例如在0.1torr~500torr之間。

至於光學觀測系統108的詳細構造可參照圖2A和圖2B。

圖2A是光學觀測系統之一例的側視圖。

圖2B是光學觀測系統之一例的俯視圖。

在圖2A和圖2B中，觀測鏡片118包括一透明基板200、位於透明基板200表面的一螢光塗層202以及介於透明基板200與螢光塗層202之間的一遮蔽塗層204，而在可調式懸吊件120與觀測鏡片118之間利用夾持件206結合。

透明基板200例如玻璃；螢光塗層202例如Y 2O 3:Eu紅光粉或YAG:Ce黃光粉等，或其他具光激發及電子束激發效果的可見光螢光粉，以顆粒膜型態或混合膠結材料如透明矽膠、透明環氧樹脂、或透明sol-gel低溫燒結玻璃等進行塗佈。

遮蔽塗層204例如不透光或反光材料如銅、鋁等金屬鍍膜；或氧化鋁、二氧化鈦等陶瓷鍍膜。

以下描述使用觀測鏡片118測量平面電漿有效影響區114的過程。

首先，無論在產生平面電漿或者尚未產生平面電漿的狀態，均可利用可調式懸吊件120將觀測鏡片118移至處理內腔110的底部，貼近於絕緣基板115，然後在有平面電漿114點燃的情況下，利用可調式懸吊件120將觀測鏡片118徐徐地向上移。

當觀測鏡片118位在平面電漿有效影響區114的有效影響區以下的電漿鞘(暗區)，其側視圖與俯視圖如圖3A-1與圖3A-2所示，其中螢光塗層202和透明基板200都呈現較暗的影像。

當觀測鏡片118到達平面電漿有效影響區114的範圍(亮區)內，其側視圖與俯視圖如圖內圖3B-1與圖3B-2所示，其中螢光塗層202會受平面電漿114的激發而發光，且透明基板200也會轉變為較亮的影像。

但是當觀測鏡片118移至超出平面電漿有效影響區114範圍以外的上方，其側視圖與俯視圖如圖3C-1與圖3C-2所示，一旦螢光塗層202移出平面電漿有效影響區114，因為遮蔽塗層204會使得該區域的螢光塗層202無法受其下方的短波長光(即有效影響區114)所激發，所以螢光塗層202會變暗，但透明基板200因為是透明的所以亮度不會有明顯改變。

因此，根據觀測鏡片118中螢光塗層202與透明基板200的亮暗變化，可得到平面電漿有效影響區114的範圍(即厚度H1)。

然而上述圖2A的光學觀測系統只是一種可採用的實施例，其他有類似本發明的觀測系統並不限於此。

圖4是第一實施例的另一種電漿處理裝置的示意圖，其中使用與圖1相同的元件符號表示相同或相似的構件。

圖4的電漿處理裝置100與圖1的差異在於，平面電漿產生電極104與絕緣基板115是設置在腔體102內部，而且另有與光纖感測器128連接的外部分析設備400、與進氣口102a連接的氣體供應裝置402、與腔體102連接用以控制處理內腔110壓力的壓力控制裝置404。

所述外部分析設備400例如分光頻譜儀或輝度計，用以確認及校驗數位攝影裝置126的準確性。

所述氣體供應裝置402則可供應氣體進入腔體102，其中氣體的流量例如在0.5sccm~200sccm之間，且上述氣體包括反應性氣體或惰性氣體，所述惰性氣體例如氦、氖、氬、氮或其組合、所述反應性氣體例如氧氣、氨氣、氫氣或其組合。

舉例來說，如要加強表面的疏水性，可用氫氣(H 2)、氮氣(N 2)或其混合氣體；如要進行親水性處理，可分為反應性氣體如氧氣(O 2)及非反應性氣體如氬氣(Ar)、氦氣(He)兩類。

反應性氣體的處理會強迫性地將解離的氣體原子鍵接到物體的表面上，而非反應性氣體則單純地進行清除作用，留下大量的空懸鍵(danglingbond)，一旦返回大氣，空懸鍵立即與空氣中的氧氣(O 2)或水氣(H 2O)起作用，形成富含氧原子或氫氧根(hydroxyl)的親水表面。

壓力控制裝置404則可將壓力控制在如0.1torr~500torr之間，用以調節平面電漿有效影響區114的厚度H1範圍、其下方無處理效能的電漿鞘區與其上方的「電漿外(beyondplasma)」區域的佔據範圍。

若是搭配平面電漿產生電極104上的偏壓，可控制產生平面電漿的電場在如2KV/cm~30KV/cm，以改變平面電漿密度的分佈型態。

圖5是圖4中的試片處理之一例的剖面示意圖。

在圖5中，平面電漿有效影響區114的範圍內可設置圖案遮罩500，貼近被處理的試片116的表面，以針對試片116的預定部位116a進行處理，且圖案遮罩500只要能隔開試片116與平面電漿有效影響區114即可，並不需要如光阻之類的接觸式遮罩(contactmask)，即可完成預定部位116a的電漿處理，其中所述圖案遮罩500例如離型紙。

圖6是依照本發明的第二實施例的一種電漿處理流程的步驟圖。

在步驟600中，在一電漿處理腔體內產生一平面電漿。

在本實施例中，產生平面電漿的電場例如在2KV/cm~30KV/cm之間，且調整平面電漿的電場，便能改變試片的表面的親、疏水性。

舉例來說，使用惰性氣體的電漿清除試片的表面官能基，會遺留大量的空懸鍵(danglingbond)，所以再返回到大氣環境就會吸附氧或水氣，使試片表面轉變為親水性；然而經實驗發現，當電場強度低於某一個臨界值，處理後的試片表面的接觸角甚至超過了未經處理的表面，這有可能是因為電漿的能量不足以完全清除試片上的表面官能基，導致處理後的試片表面轉而更為疏水。

因此，藉由增加電場能使試片表面變為親水性，而降低電場的話，有可能使試片表面更為疏水。

此外，產生平面電漿期間所流通的氣體例如有反應性氣體或惰性氣體，其中惰性氣體包括氦氣、氖氣、氬氣、氮氣或其組合，反應性氣體包括氧氣、氨氣、氫氣或其組合，且前述氣體的流量例如在0.5sccm~200sccm之間。

在步驟602中，觀測平面電漿的有效影響區，以取得平面電漿的有效影響區的位置及厚度範圍。

至於觀測平面電漿有效影響區的厚度範圍的方法，可利用一光學觀測系統進行測量。

所述光學觀測系統可參照圖2A與圖2B所示，其至少包括可調式懸吊件與含有透明基板、螢光塗層以及遮蔽塗層的觀測鏡片。

藉由調整觀測鏡片的位置，觀察螢光塗層與透明基板的明暗變化，來測量平面電漿的高度範圍，其中觀察所述明暗變化的方法例如目視或者利用數位攝影裝置，且可利用外部分析設備來確認及校驗數位攝影裝置的準確性。

上述平面電漿有效影響區的厚度範圍約在0.1mm~20.0mm之間。

在步驟602之後進行步驟604，調整一試片的位置至有效影響區內。

然後在步驟606中，對試片進行電漿處理。

所述電漿處理例如表面親疏水改質，且適於在過程中使用遮罩(mask)或參數的調整，達到親疏水特性差異化的圖案(patterning)效果。

其他可應用本裝置的電漿處理作業例如表面活化接枝、表面粗化、化合物分解反應、氣相沉積、乾蝕刻等等不在此限。

此外，在步驟604之前還可先調整平面電漿有效影響區的範圍，如平面電漿有效影響區的厚度以及/或者平面電漿有效影響區的所在的高程位置。

圖7是依照本發明的第三實施例的一種電漿處理流程的步驟圖，其中具有與第二實施例相同的步驟，所以可直接參照第二實施例的步驟600、602、604、606與608。

至於第三實施例中與第二實施例之差異，將詳述於下。

首先，在步驟602之前，也可先進行步驟700的調節壓力。

在步驟700中，壓力例如在0.1torr~500torr之間。

藉由調節壓力能改變平面電漿的有效影響區，譬如放大或縮小平面電漿的有效影響區。

如此一來，可控制平面電漿的有效影響區至所需的範圍內，再進行步驟604；或者在改變平面電漿的有效影響區後，進行步驟602，以便即時性的確認觀測平面電漿有效影響區的厚度範圍。

而且，進行步驟606之後，如要對樣品的不同部位、區域或高度的表面進行處理，還可重複進行步驟700，來改變平面電漿有效影響區到待處理的部位、區域或高程的表面。

圖8是用於本發明的第四實施例的一種電漿處理流程的試片之側視圖。

圖9A至圖9C是依照本發明的第四實施例調節在不同氣壓下的電漿處理的示意圖，其中使用與圖1相同的元件符號表示相同或相似的構件。

在圖8中，試片800具有立體表面，如三個不同高度的待處理表面800a、800b與800c。

由圖9A可見，試片800的待處理表面800a離平面電漿產生電極104最近，當使用較高的壓力(如50torr~200torr)，能得到較扁平的緊縮型(condensed)平面電漿900a，且平面電漿900a的位置也較低(如距離電極104有0.1mm~0.7mm)，所以可將觀測鏡片118對齊待處理表面800a，再進行連動式觀測平面電漿的高度範圍的步驟，以取得平面電漿900a的有效影響區，並選擇性地單獨處理待處理表面800a的圖案。

在圖9B中，當改用較低的壓力(如0.1torr~1.0torr)，會得到較為寬厚的擴散型(diffused)平面電漿900b，且平面電漿900b的位置也較高(如距離電極104有1mm~3mm)，當觀測鏡片118對齊待處理表面800b，得以選擇性地單獨處理待處理表面800b的圖案 在圖9C中，當壓力被調節至圖9A與圖9C之間的範圍(如0.2torr~20torr)時，會得到具一定厚度的緊縮型(condensed)平面電漿900c，當觀測鏡片118對齊待處理表面800b，能同時處理待處理表面800b與800c的圖案。

因此，根據第四實施例能得到藉由氣體壓力的調節，可改變平面電漿的有效影響區，進而處理立體表面上的不同區域。

上述第四實施例的應用例如錢幣的多重金屬表面處理。

如果使用具備觸媒特性的金屬所製的錢幣(如銅幣、銀幣、鎳幣等)，可先全面性地以較低的供應電場及較為擴散(diffused)的電漿型態將錢幣轉為殊水表面，然後再就特定高度的圖案表面選擇性地處理為親水性，之後塗覆水性保護漆，因僅有親水性的表面會有保護性的水性漆所覆蓋，所以固化(curing)後再進行化學鍍的各項處理，即可在裸露(無水性漆覆蓋)的其他表面鍍上其它類型的金屬，即在不同的部位上作選擇性的鍍膜，以獲得防鏽、美觀或提升價值及質感的功效。

至於較低的供應電場及轉為殊水表面的實證可見於以下實施例的說明。

以下列舉幾個實驗例與比較例來確認本發明的功效，但本發明的範圍並不侷限於以下內容。

實驗例1 使用如圖1的裝置，且電漿產生的方式是共平面指叉型電極(comblike)的介電被覆式放電(coplanardielectricbarrierdischarge)的激發型式，處理的試片為聚亞醯胺(polyimide,PI)，厚度75µm~100µm。

試片在處理之前先經過簡單的去油處理：在乙醇酒精中超音波震盪5分鐘後，在60°C的烘箱中烘乾。

處理的試片表面正對共平面電極板，控制參數條件列示如下：緩衝氣體：氬氣(Ar)；壓力：約0.5torr~10torr；氣體流量：約10sccm~50sccm；電場強度：12KV/cm；試片距離電極約2mm；處理時間：0秒~300秒。

處理完畢後試片在大氣下靜置2分鐘後以微針尖給純水，水珠在試片上停留10秒鐘後讀取數據，純水接觸角(watercontactangle,CTindegree)及濕潤張力(wettension,WTinNm/m)的量測結果分別顯示於圖10A與圖10B。

從圖10A與圖10B可得到，處理15秒鐘即有明顯的效果，純水接觸角由約75度降到10度以下，純水濕潤張力則快速翻升了超過4倍，最高達到約70Nm/m。

實驗例2 與實驗例1採用相同的處理方式與檢測方式，但其中處理時間固定為120秒，並且改為變換施加電場。

純水接觸角及濕潤張力的量測結果分別顯示於圖11A與圖11B。

從圖11A與圖11B可得到，當電場強度低於某一個臨界值，如本實驗例為8KV/cm，處理後試片表面的接觸角甚至超過了未經處理的表面，因此如要使試片表面呈親水性，有效的處理電場強度需＞9KV/cm；如要使試片表面更為疏水，則處理電場強度要低於8KV/cm。

至於純水濕潤張力則是隨電場增加而快速增加，最高達到約70Nm/m。

實驗例3 與實驗例2採用相同的處理方式與檢測方式，但其中下修試片距離電極至1mm。

接觸角及濕潤張力的量測結果分別顯示於圖12A與圖12B。

從圖12A與圖12B可得到，當電場強度低於某一個臨界值，如本實驗例為9KV/cm，處理後試片表面的接觸角甚至超過了未經處理的表面，因此如要使試片表面呈親水性，有效的處理電場強度需＞10KV/cm；如要使試片表面更為疏水，則處理電場強度要低於9KV/cm。

不過由於試片放置於靠近電漿鞘(plasmasheath)的位置，所以與實驗例2完全相同處理的條件下，會得到較實驗例2差的結果。

表現出必須超過較高的臨界電場，才能與實驗例2取得相同的處理效果。

另外，在以上三個實施例，試片與電極板(雙電極共平面)間的距離1mm~2mm，處理前及處理後經目視均沒有察覺到試片表面有任何電漿侵蝕(plasmaetching)的現象。

實驗例4 與實驗例2採用相同的處理方式與檢測方式，但其中下修試片距離電極至0.1mm~0.2mm。

結果顯示在相同處理條件對試片的親水性均不具有效改善的效果，這是因為試片已落入電漿鞘的範圍。

將氣體壓力提高到大於500torr，試片表面則出現受電漿侵蝕(plasmaetching)的痕跡。

以純水滴作測試，發現雖然部份受電漿侵蝕的區域呈現親水性，然未受電漿侵蝕的區域則依然維持疏水的表面特性。

電漿的密度已過於集中而不適用於非侵蝕性的表面改質，雖然調整電場強度可略為改善，然而在過高氣體壓力下(ex.500torr)電漿密度過於集中的現象無法完全杜絕，也就是說無法轉變為擴散均勻的電漿。

實驗例5 處理的試片改為一般玻璃，並採用實驗例2~3的方式處理，測得純水接觸角約4度至5度之間，說明以惰性氣體電漿清除物體的表面官能基，遺留大量的空懸鍵(danglingbond)，再返回到大氣環境吸附氧或水氣的作法，因為不涉及化學反應，而以物理吸附作進行表面修飾，應可適用於大多數在常溫下不發生反應的物體表面。

由實驗例2及實驗例3已知，當電漿的能量不足以完全清除試片上的表面官能基時，處理後的疏水性會不降反升。

利用這項特點，在試片與電極之間加設遮罩；或者是利用電漿有效影響區存在的高程(elevation)，進行選擇性的處理。

實驗例6 以離型紙切平行的溝，貼附在PI試片的表面，經實驗例2的方式處理後，立即投入錫鈀膠體溶液中浸泡15分鐘，使得親水的部位得以吸附上觸媒金屬微粒。

清洗烘乾PI試片後，在無電鍍銅鍍液中浸泡5分鐘。

經觀察可以確定，離型紙所遮住的部位因為更加疏水，因此完全無法吸附錫鈀膠體，最終也就不會有銅的沉積；反之從切溝曝露於電漿的部位則明顯有銅的沉積。

實驗例7 使用含銀(Ag)的無機鹽在乙醇中的溶液作為前驅物，濃度為0.05M，經目視在未處理的PI試片表面上無法潤濕(wetting)，呈現凝聚結團的現象，旋轉塗佈後完全無附著。

相同的前驅物，旋轉塗佈(spincoat)在實施例1處理所得的試片上，經目視其可得均勻的附著。

以上兩種試片經烘箱100℃烘烤30分鐘，進行熱劣解轉化後，在無電鍍銅鍍液中浸鍍5分鐘。

經目視未處理的PI試片完全無上銅的跡象，實施例1處理所得的試片上則全面覆銅。

另外以印章沾附以上前驅物壓印在實施例1處理所得的另一試片上，進行熱轉化與化學鍍，經目視可再現印章圖案的銅在此試片上。

綜上所述，本發明使用平面電漿並藉由光學觀測系統取得平面電漿有效影響區的厚度範圍，因此可對位於該厚度範圍內的試片表面產生快速有效的處理。

因此本發明有別於一般將處理基板整片涵浸(immerse)在氣體電漿之中，而可選擇處理面，或加上遮罩僅對部份區域進行改質，創造出有圖案差異化的親疏水特性，對於電漿能量的利用也會更有效。

雖然本發明已以實施例揭露如上，然其並非用以限定本發明，任何所屬技術領域中具有通常知識者，在不脫離本發明的精神和範圍內，當可作些許的更動與潤飾，故本發明的保護範圍當視後附的申請專利範圍所界定者為準。

100‧‧‧電漿處理裝置 102‧‧‧腔體 102a‧‧‧進氣口 102b‧‧‧排氣口 104‧‧‧平面電漿產生電極 106‧‧‧試片懸吊夾持系統 108‧‧‧光學觀測系統 110‧‧‧處理內腔 112‧‧‧視窗 114、900a、900b、900c‧‧‧平面電漿有效影響區 115‧‧‧絕緣基板 116、800‧‧‧試片 116a‧‧‧預定部位 118‧‧‧觀測鏡片 120、124‧‧‧可調式懸吊件 122、206‧‧‧夾持件 126‧‧‧數位攝影裝置 128‧‧‧光纖感測器 400‧‧‧外部分析設備 402‧‧‧氣體供應裝置 404‧‧‧壓力控制裝置 500‧‧‧圖案遮罩 600、602、604、606、608、700‧‧‧步驟 800a、800b、800c‧‧‧表面 H1‧‧‧平面電漿有效影響區的厚度 H2‧‧‧試片與平面電漿產生電極的距離 P‧‧‧平面電漿產生電極線的間距 t‧‧‧介電材料的厚度 W‧‧‧平面電漿產生電極線的寬度 圖1是依照本發明的第一實施例的一種電漿處理裝置的示意圖。

圖2A是圖1的電漿處理裝置中的光學觀測系統之側視圖。

圖2B是圖1的電漿處理裝置中的光學觀測系統之俯視圖。

圖3A-1是圖2A的光學觀測系統在平面電漿有效影響區範圍以下之側視圖。

圖3A-2是圖2B的光學觀測系統在平面電漿有效影響區範圍以下之俯視圖。

圖3B-1是圖2A的光學觀測系統在平面電漿的有效影響區範圍內之側視圖。

圖3B-2是圖2B的光學觀測系統在平面電漿的有效影響區範圍內之俯視圖。

圖3C-1是圖2A的光學觀測系統在超出平面電漿有效影響區範圍上方之側視圖。

圖3C-2是圖2B的光學觀測系統在超出平面電漿有效影響區範圍上方之俯視圖。

圖4是第一實施例的另一種電漿處理裝置的示意圖。

圖5是圖4中的試片處理之一例的剖面示意圖。

圖6是依照本發明的第二實施例的一種電漿處理流程的步驟圖。

圖7是依照本發明的第三實施例的一種電漿處理流程的步驟圖。

圖8是用於本發明的第四實施例的一種電漿處理流程的試片之側視圖。

圖9A至圖9C是依照本發明的第四實施例中對應不同氣壓的電漿處理示意圖。

圖10A是實驗例1的接觸角(contactangle)與處理時間之關係曲線圖。

圖10B是實驗例1的濕潤張力(wettingtension)與處理時間之關係曲線圖。

圖11A是實驗例2的接觸角與供應電場之關係曲線圖。

圖11B是實驗例2的濕潤張力與供應電場之關係曲線圖。

圖12A是實驗例3的接觸角與供應電場之關係曲線圖。

圖12B是實驗例3的濕潤張力與供應電場之關係曲線圖。

Claims(25) 一種電漿處理裝置，包括：一腔體，定義出一處理內腔，且該腔體的頂部具有一視窗；一平面電漿產生電極，位於該處理內腔內，用以產生平面電漿；一試片懸吊夾持系統，相對該平面電漿產生電極配置於該處理內腔內，用以懸吊夾持一試片；以及一光學觀測系統，位於該試片懸吊夾持系統旁的該處理內腔內，以透過該腔體的該視窗測量該平面電漿之有效影響區的厚度範圍。

如申請專利範圍第1項所述的電漿處理裝置，其中該光學觀測系統與該試片懸吊夾持系統為連動或是不連動。

如申請專利範圍第1項所述的電漿處理裝置，其中該光學觀測系統包括：一觀測鏡片，包括一透明基板、位於該透明基板的表面的一螢光塗層以及介於該透明基板與該螢光塗層之間的一遮蔽塗層；以及一可調式懸吊件，連接該觀測鏡片，用以懸吊調整該觀測鏡片在該處理內腔內的高度。

如申請專利範圍第1項所述的電漿處理裝置，其中該光學觀測系統更包括：一數位攝影裝置，相對該視窗配置於該腔體外；以及一光纖感測器，位於該視窗，用以傳遞光訊號至外部分析設備。

如申請專利範圍第4項所述的電漿處理裝置，其中該外部分析設備包括分光頻譜儀或輝度計，用以確認及校驗該數位攝影裝置的準確性。

如申請專利範圍第1項所述的電漿處理裝置，更包括一氣體供應裝置，用以供應氣體至該處理內腔，其中該氣體的流量介於0.5sccm~200sccm之間。

如申請專利範圍第1項所述的電漿處理裝置，更包括一壓力控制裝置，用以控制該處理內腔的壓力，其中該壓力介於0.1torr~500torr之間。

如申請專利範圍第1項所述的電漿處理裝置，其中該平面電漿產生電極包括指梳狀電極、方形迴圈、圓形迴圈、U型線、S型線或蛇形線。

如申請專利範圍第1項所述的電漿處理裝置，更包括一圖案遮罩，貼近該試片的表面，以針對該試片的預定部位進行處理。

一種電漿處理方法，包括：在一電漿處理腔體內產生一平面電漿；觀測該平面電漿的有效影響區，以取得該平面電漿的該有效影響區的位置及厚度範圍；調整一試片的位置至該有效影響區內；以及對該試片進行電漿處理。

如申請專利範圍第10項所述的電漿處理方法，其中調整該試片的位置之前更包括調整該平面電漿的該有效影響區的厚度及位置。

如申請專利範圍第10項所述的電漿處理方法，其中觀測該平面電漿的該有效影響區的該厚度範圍之方法包括：利用一光學觀測系統進行觀測，該光學觀測系統包括一觀測鏡片，該觀測鏡片包括一透明基板、位於該透明基板的表面的一螢光塗層以及介於該透明基板與該螢光塗層之間的一遮蔽塗層。

如申請專利範圍第12項所述的電漿處理方法，其中觀測該平面電漿的該高度範圍的方法包括：調整該觀測鏡片的位置，以觀察該螢光塗層與該透明基板的明暗變化。

如申請專利範圍第13項所述的電漿處理方法，其中觀察該螢光塗層與該透明基板的明暗變化的方法包括目視或者利用數位攝影裝置。

如申請專利範圍第14項所述的電漿處理方法，更包括利用外部分析設備來確認及校驗該數位攝影裝置的準確性。

如申請專利範圍第10項所述的電漿處理方法，其中該試片具有立體表面，且藉由調節壓力來改變該平面電漿的該有效影響區，以處理該立體表面上的不同區域。

如申請專利範圍第10項所述的電漿處理方法，其中產生該平面電漿之後更包括：藉由調節壓力來放大或縮小該平面電漿的該有效影響區。

如申請專利範圍第17項所述的電漿處理方法，其中該壓力介於0.1torr~500torr之間。

如申請專利範圍第10項所述的電漿處理方法，其中產生該平面電漿期間所流通的氣體包括反應性氣體或惰性氣體。

如申請專利範圍第19項所述的電漿處理方法，其中該惰性氣體包括氦氣、氖氣、氬氣、氮氣或其組合，該反應性氣體包括氧氣、氨氣、氫氣或其組合。

如申請專利範圍第19項所述的電漿處理方法，其中該氣體的流量介於0.5sccm~200sccm之間。

如申請專利範圍第10項所述的電漿處理方法，其中該平面電漿的該有效影響區的該厚度範圍在0.1mm~20.0mm之間。

如申請專利範圍第10項所述的電漿處理方法，其中產生該平面電漿的電場在2KV/cm~30KV/cm之間。

如申請專利範圍第10項所述的電漿處理方法，其中進行該電漿處理之前更包括：調整該平面電漿的電場，以改變該試片的表面的親、疏水性。

如申請專利範圍第10項所述的電漿處理方法，更包括於該試片的表面設置一圖案遮罩，以針對該試片的預定部位進行該電漿處理。

TW105143813A 2016-12-29 2016-12-29 電漿處理裝置與電漿處理方法 TWI620228B (zh) PriorityApplications(1) ApplicationNumber PriorityDate FilingDate Title TW105143813A TWI620228B (zh) 2016-12-29 2016-12-29 電漿處理裝置與電漿處理方法 ApplicationsClaimingPriority(4) ApplicationNumber PriorityDate FilingDate Title TW105143813A TWI620228B (zh) 2016-12-29 2016-12-29 電漿處理裝置與電漿處理方法 US15/851,662 US10504703B2 (en) 2016-12-29 2017-12-21 Plasmatreatmentapparatus JP2017244663A JP6678636B2 (ja) 2016-12-29 2017-12-21 プラズマ処理装置及びプラズマ処理方法 US16/664,925 US20200058476A1 (en) 2016-12-29 2019-10-27 Plasmatreatmentmethod Publications(2) PublicationNumber PublicationDate TWI620228B true TWI620228B (zh) 2018-04-01 TW201824332A TW201824332A (zh) 2018-07-01 Family ID=62639845 FamilyApplications(1) ApplicationNumber Title PriorityDate FilingDate TW105143813A TWI620228B (zh) 2016-12-29 2016-12-29 電漿處理裝置與電漿處理方法 CountryStatus(3) Country Link US (2) US10504703B2 (zh) JP (1) JP6678636B2 (zh) TW (1) TWI620228B (zh) FamiliesCitingthisfamily(3) *Citedbyexaminer,†Citedbythirdparty Publicationnumber Prioritydate Publicationdate Assignee Title JP2020077759A (ja) * 2018-11-08 2020-05-21 株式会社日立ハイテク プラズマ処理装置 US11120978B2 (en) * 2019-01-29 2021-09-14 QuantumInnovations,Inc. 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