TW201308392A - 電漿處理裝置及電漿處理方法

作為習知技術之特開2000-269195號公報(專利文獻1)，係揭示在晶圓偏壓用匹配器之輸出與保持晶圓之電極之間，針對偏壓之峰值(Peak to Peak Value)Vpp、自偏壓Vdc、裝置系之 ... TW201308392A-電漿處理裝置及電漿處理方法 -GooglePatents 電漿處理裝置及電漿處理方法 DownloadPDF Info Publicationnumber TW201308392A TW201308392A TW100134776A TW100134776A TW201308392A TW201308392A TW201308392A TW201308392A TW100134776A TW100134776A TW100134776A TW100134776A TW100134776A TW100134776A TW201308392A TW201308392A TW201308392A Authority TW Taiwan Priorartkeywords wafer plasma mounting detector disposed Priorartdate 2011-08-15 Applicationnumber TW100134776A Otherlanguages English(en) Otherversions TWI484524B (zh Inventor KenjiMaeda AtsushiItou MasaruIzawa OriginalAssignee HitachiHighTechCorp Prioritydate(Theprioritydateisanassumptionandisnotalegalconclusion.Googlehasnotperformedalegalanalysisandmakesnorepresentationastotheaccuracyofthedatelisted.) 2011-08-15 Filingdate 2011-09-27 Publicationdate 2013-02-16 2011-08-15 PrioritytoJP2011177387A priority Critical patent/JP5898882B2/ja 2011-09-27 ApplicationfiledbyHitachiHighTechCorp filed Critical HitachiHighTechCorp 2013-02-16 PublicationofTW201308392A publication Critical patent/TW201308392A/zh 2015-05-11 Applicationgranted granted Critical 2015-05-11 PublicationofTWI484524B publication Critical patent/TWI484524B/zh Links Espacenet GlobalDossier Discuss 210000002381 Plasma Anatomy 0.000 title claims abstract description 56 238000003672 processingmethod Methods 0.000 title claims description 7 238000000034 method Methods 0.000 claims abstract description 10 230000002093 peripheral Effects 0.000 claims description 13 238000005513 biaspotential Methods 0.000 claims description 8 230000001808 coupling Effects 0.000 claims description 6 238000010168 couplingprocess Methods 0.000 claims description 6 238000005859 couplingreaction Methods 0.000 claims description 6 150000002500 ions Chemicalclass 0.000 abstract description 22 238000003754 machining Methods 0.000 abstract 1 239000000758 substrate Substances 0.000 description 43 239000007789 gas Substances 0.000 description 32 238000005530 etching Methods 0.000 description 17 230000005540 biologicaltransmission Effects 0.000 description 15 239000000463 material Substances 0.000 description 14 238000009826 distribution Methods 0.000 description 13 229910052751 metal Inorganicmaterials 0.000 description 10 239000002184 metal Substances 0.000 description 10 230000005684 electricfield Effects 0.000 description 9 239000003507 refrigerant Substances 0.000 description 9 239000004065 semiconductor Substances 0.000 description 6 229910052782 aluminium Inorganicmaterials 0.000 description 5 XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemicalcompound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
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 [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1 229910052719 titanium Inorganicmaterials 0.000 description 1 238000007740 vapordeposition Methods 0.000 description 1 229940105963 yttriumfluoride Drugs 0.000 description 1 Classifications H—ELECTRICITY H01—BASICELECTRICELEMENTS H01J—ELECTRICDISCHARGETUBESORDISCHARGELAMPS H01J37/00—Dischargetubeswithprovisionforintroducingobjectsormaterialtobeexposedtothedischarge,e.g.forthepurposeofexaminationorprocessingthereof H01J37/32—Gas-filleddischargetubes,e.g.forsurfacetreatmentofobjectssuchascoating,plating,etching,sterilisingorbringingaboutchemicalreactions H01J37/32009—Arrangementsforgenerationofplasmaspeciallyadaptedforexaminationortreatmentofobjects,e.g.plasmasources H01J37/32082—Radiofrequencygenerateddischarge H01J37/32137—Radiofrequencygenerateddischargecontrollingofthedischargebymodulationofenergy H01J37/32146—Amplitudemodulation,includespulsing H—ELECTRICITY H05—ELECTRICTECHNIQUESNOTOTHERWISEPROVIDEDFOR H05H—PLASMATECHNIQUE;PRODUCTIONOFACCELERATEDELECTRICALLY-CHARGEDPARTICLESOROFNEUTRONS;PRODUCTIONORACCELERATIONOFNEUTRALMOLECULARORATOMICBEAMS H05H1/00—Generatingplasma;Handlingplasma H05H1/24—Generatingplasma H05H1/46—Generatingplasmausingappliedelectromagneticfields,e.g.highfrequencyormicrowaveenergy H—ELECTRICITY H01—BASICELECTRICELEMENTS H01J—ELECTRICDISCHARGETUBESORDISCHARGELAMPS H01J37/00—Dischargetubeswithprovisionforintroducingobjectsormaterialtobeexposedtothedischarge,e.g.forthepurposeofexaminationorprocessingthereof H01J37/32—Gas-filleddischargetubes,e.g.forsurfacetreatmentofobjectssuchascoating,plating,etching,sterilisingorbringingaboutchemicalreactions H01J37/32917—Plasmadiagnostics H01J37/32935—Monitoringandcontrollingtubesbyinformationcomingfromtheobjectand/ordischarge H—ELECTRICITY H01—BASICELECTRICELEMENTS H01L—SEMICONDUCTORDEVICES;ELECTRICSOLIDSTATEDEVICESNOTOTHERWISEPROVIDEDFOR H01L21/00—Processesorapparatusadaptedforthemanufactureortreatmentofsemiconductororsolidstatedevicesorofpartsthereof H01L21/02—Manufactureortreatmentofsemiconductordevicesorofpartsthereof H01L21/04—Manufactureortreatmentofsemiconductordevicesorofpartsthereofthedeviceshavingatleastonepotential-jumpbarrierorsurfacebarrier,e.g.PNjunction,depletionlayerorcarrierconcentrationlayer H01L21/18—Manufactureortreatmentofsemiconductordevicesorofpartsthereofthedeviceshavingatleastonepotential-jumpbarrierorsurfacebarrier,e.g.PNjunction,depletionlayerorcarrierconcentrationlayerthedeviceshavingsemiconductorbodiescomprisingelementsofGroupIVofthePeriodicSystemorAIIIBVcompoundswithorwithoutimpurities,e.g.dopingmaterials H01L21/20—Depositionofsemiconductormaterialsonasubstrate,e.g.epitaxialgrowthsolidphaseepitaxy H01L21/205—Depositionofsemiconductormaterialsonasubstrate,e.g.epitaxialgrowthsolidphaseepitaxyusingreductionordecompositionofagaseouscompoundyieldingasolidcondensate,i.e.chemicaldeposition H—ELECTRICITY H01—BASICELECTRICELEMENTS H01L—SEMICONDUCTORDEVICES;ELECTRICSOLIDSTATEDEVICESNOTOTHERWISEPROVIDEDFOR H01L21/00—Processesorapparatusadaptedforthemanufactureortreatmentofsemiconductororsolidstatedevicesorofpartsthereof H01L21/02—Manufactureortreatmentofsemiconductordevicesorofpartsthereof H01L21/04—Manufactureortreatmentofsemiconductordevicesorofpartsthereofthedeviceshavingatleastonepotential-jumpbarrierorsurfacebarrier,e.g.PNjunction,depletionlayerorcarrierconcentrationlayer H01L21/18—Manufactureortreatmentofsemiconductordevicesorofpartsthereofthedeviceshavingatleastonepotential-jumpbarrierorsurfacebarrier,e.g.PNjunction,depletionlayerorcarrierconcentrationlayerthedeviceshavingsemiconductorbodiescomprisingelementsofGroupIVofthePeriodicSystemorAIIIBVcompoundswithorwithoutimpurities,e.g.dopingmaterials H01L21/30—TreatmentofsemiconductorbodiesusingprocessesorapparatusnotprovidedforingroupsH01L21/20 - H01L21/26 H01L21/302—TreatmentofsemiconductorbodiesusingprocessesorapparatusnotprovidedforingroupsH01L21/20 - H01L21/26tochangetheirsurface-physicalcharacteristicsorshape,e.g.etching,polishing,cutting H01L21/306—Chemicalorelectricaltreatment,e.g.electrolyticetching H01L21/3065—Plasmaetching;Reactive-ionetching Abstract 提供可將晶圓上之離子能量調節於所要範圍之值，可以進行高精確度加工或長期間穩定處理的電漿處理裝置。

電漿處理裝置，係具備：處理室，配置於真空容器內，於內部形成電漿；載置台，配置於該處理室內，於其上部之載置面載置處理對象晶圓；及電源，用於供給高頻電力而在配置於該載置台內部的電極形成偏壓電位；由上述電源供給上述高頻電力之同時，使用上述電漿來處理上述晶圓者；其特徵為具備：檢測器，被配置於上述載置台之上述載置面外周側，由形成於其上方之上述偏壓之電壓值檢測出最大值與最小值之差之成份Vpp以及直流成份Vdc；及控制器，其依據該檢測器之輸出，於上述處理中以使Vpp/2+|Vdc|之值成為一定的方式，來調節高頻偏壓電力之輸出。

Description 電漿處理裝置及電漿處理方法 本發明關於使用形成於真空容器內之處理室內的電漿，針對配置於該處理室內的半導體晶圓等基板狀試料進行處理的電漿處理裝置及電漿處理方法，特別關於處理中在處理室內之試料台之載置面所載置試料上，形成高頻電力之偏壓電位，而處理試料的電漿處理裝置及電漿處理方法。

半導體裝置之量產過程中廣泛使用電漿蝕刻、電漿CVD(ChemicalVaporDeposition)、電漿去灰等之電漿處理。

電漿處理，係對減壓狀態之處理氣體施加高頻電力或微波電力而產生電漿，使離子或自由基照射至晶圓而進行。

特別是，於電漿蝕刻係對晶圓施加數百kHz至數十MHz之高頻偏壓，使電漿中之離子積極引入晶圓而進行異向性高的加工。

伴隨半導體裝置之微細化進展，依據國際半導體技術藍圖(InternationalTechnologyRoadmapforSemiconductors;ITRS)，22nm節點之量產將於2014年～2016年之間開始。

此時之電晶體構造，可以預想將由目前主流之平面型(planar)轉換為雙閘極型、三閘極型等具有3D構造的FinFET型之主流。

將來之半導體裝置之製造使用的電漿處理裝置，特別是，要求微細化之電漿處理裝置更被要求極限之微細加工性能或控制性、穩定性。

通常，電漿處理裝置為能獲得蝕刻形狀或蝕刻速度、遮罩選擇比、底層選擇比等相關之要求性能，而針對電漿產生用之來源電力、偏壓電力、各種氣體流量、氣體壓力等參數(外部參數)加以調節成為所要值之範圍，而進行處理。

另外，針對和蝕刻性能直接相關的電漿密度、或自由基密度之值或其分佈、射入晶圓之離子能量等之參數(內部參數)進行檢測，將其調節成為所要值之範圍，而進行處理的對策被檢討。

作為習知技術之特開2000-269195號公報(專利文獻1)，係揭示在晶圓偏壓用匹配器之輸出與保持晶圓之電極之間，針對偏壓之峰值(PeaktoPeakValue)Vpp、自偏壓Vdc、裝置系之阻抗Z之之其中至少一方進行測定，依據該測定值來控制偏壓電源之輸出的技術。

專利文獻1並非將外部參數之偏壓電力控制成為一定，而是使偏壓之Vpp、Vdc等成為一定的方式進行偏壓電力之回授控制，可以抑制蝕刻裝置之長時間穩定之稼動，亦即可以抑制長期間運用時之蝕刻特性之時間變化，進而可以判斷電漿處理腔室之適當之洗淨時期。

特開2005-277270號公報(專利文獻2)，係揭示藉由測定電漿處理中之晶圓偏壓Vpp之工程，及調節晶圓保持電極與高頻偏壓電源間之靜電容量之工程，將晶圓偏壓Vpp保持於所要之一定值的技術。

該習知技術係藉由此一構成，可以減少每一晶圓之電漿狀態之變化，實現均勻化，降低處理之不均。

特開2008-244429號公報(專利文獻3)，係揭示高精確度蝕刻具有FinFET段差之膜構造的方法，其將複數頻率之偏壓電力供給至晶圓，而獨立控制射入晶圓之離子之平均能量以及能量分佈(IonEnergyDistributionFunction：IEDF)的技術。

特開平10-74481號公報(專利文獻4)，係揭示測定被施加高頻電力的測定對象物上之離子能量的方法。

[習知技術文獻] [專利文獻] 專利文獻1：特開2000-269195號公報 專利文獻2：特開2005-277270號公報 專利文獻3：特開2008-244429號公報 專利文獻4：特開平10-74481號公報 對應於今後之裝置之微細化，於各蝕刻條件下進行要求之加工規格之離子能量分佈控制乃必要不可缺少者。

對於此一課題，上述習知技術存在以下檢討不充分之問題。

例如於專利文獻3揭示之技術，實際之蝕刻中蝕刻腔室之壁部狀態或氣相環境時時刻刻變化，對應於此，離子能量分佈亦隨時間變化，將適合此種變化之複數頻率之偏壓電力供給至晶圓或試料台內之電極乃困難者，而針對此點並未加以考慮。

另外，使用專利文獻4之技術，檢測出離子能量分佈，依據此而調節晶圓偏壓電源之輸出時，因為離子能量分佈之監控構造其原理複雜，亦需要極大之成本，作為產業用半導體裝置製造用之裝置有其實用上之困難。

於專利文獻1、2揭示者，係測定保持晶圓之電極的偏壓電壓、亦即，偏壓Vpp或Vdc，使彼等成為一定而控制偏壓電源輸出或靜電容量。

但是依據本發明人檢討發現，僅調節Vpp或Vdc成為一定時，晶圓上面之離子能量分佈未必成為一定。

使用圖5表示晶圓上之偏壓波形與IEDF之關係之模式。

本圖係以模式表示任意形狀之晶圓表面中之偏壓波形與離子能量分佈函數(IEDF)之圖表。

如圖5(a)所示，通常將供給至試料台內之電極的高頻電力產生之偏壓波形設為概略正弦波形。

和正離子比較，電子之移動度相對極大，因此產生負的自偏壓Vdc。

另外，藉由具有此種波形之偏壓進行加速而射入晶圓的電漿中之離子之能量分佈，通常作為IEDF而成為如圖5(b)所示複數個(本例為2個)形狀。

蝕刻處理時，對於圖案之垂直性或和底層間之選擇比等特性影響最大者，乃本圖所示之IEDF之高能量峰值，此由本發明人之檢討結果可以得知。

由本圖可知，高能量峰值與其所對應之離子能量之值係被Vpp/2+|Vdc|之值劃分為左右，因此，於上述習知技術調節離子能量而獲得極高之處理、獲得加工精確度乃困難者。

特別是，實際之蝕刻中，蝕刻腔室之壁部狀態或氣相環境時時刻刻變化，處理中Vpp與Vdc之間未必經常具有一定之相關性，僅調節Vpp或Vdc成為一定未必能獲得所要之離子能量分佈，習知技術針對此點並未加以考慮。

習知技術雖進行晶圓上之Vpp之測定，但晶圓上之Vdc之測定實際上極為困難。

其理由為，現在之蝕刻處理裝置或電漿處理裝置，通常使用靜電吸盤藉由靜電力量吸附晶圓而保持於電極上，具備此種靜電吸盤之裝置，產生於晶圓上之自偏壓Vdc會被靜電吸盤上之絕緣膜遮斷，因此，如專利文獻1之揭示，即使於偏壓用匹配器之輸出與晶圓保持用電極間設置Vdc之測定手段，亦難以測定Vdc。

本發明目的在於解決上述問題，提供可將晶圓上之離子能量調節於所要範圍之值，可以進行高精確度加工或長期間穩定處理的電漿處理裝置。

本發明之目的，係藉由具有可以簡單檢測出處理室內產生於晶圓上之Vdc的手段，以使Vpp/2+|Vdc|之值成為特定範圍內的方式進行調節，而減低IEDF之能量峰值之變動而達成。

更詳言之為，電漿處理裝置，係具備：真空處理室，其藉由真空排氣手段被排氣；氣體供給手段，用於對真空處理室供給氣體；來源電源，用於使上述氣體電漿化；基板載置台，用於載置晶圓；及高頻偏壓電源，其介由上述基板載置台將高頻偏壓電力施加於晶圓；其特徵為：具備由上述基板載置台之基材部進行容量耦合，並直接接觸於電漿的導電體構件；上述導電體構件之表面，係設為和晶圓大略同一高度，位於晶圓之最外周部之更外側，具備用於檢測產生於上述導電體構件的偏壓波形之峰值對峰值(PeaktoPeak)成份Vpp以及DC成份Vdc的手段，於電漿處理中以使Vpp/2+|Vdc|之值成為一定的方式，針對高頻偏壓電力之輸出進行回授控制，藉由該電漿處理裝置來達成本發明之目的。

以下參照圖面說明本發明之電漿處理裝置之實施形態。

(實施例) 參照圖1-4說明本發明之實施例。

圖1表示本發明實施例之電漿處理裝置之構成之概略縱斷面圖。

本實施例之電漿處理裝置為具備真空容器之構成。

於真空容器之上方配置供給電場或磁場之電磁場供給手段，該電場或磁場用於對配置於真空容器內之真空處理室1內形成電漿，於下方配置對真空處理室1內進行排氣之排氣手段。

另外，真空容器內之真空處理室1具有大略圓筒形，於其下方之真空容器內具備基板載置台5，用於將晶圓4載置、保持於其上面之載置面。

排氣手段係連結於配置於真空處理室1下方之排氣口，真空處理室與渦輪分子泵19等之真空泵之入口係藉由通路連通。

於真空泵與排氣口之間被配置導通調節閥18，用於對旋轉排氣之通路內之流路之斷面積進行可變調節，藉由排氣泵之動作及導通調節閥18對流路之斷面積之調節，而使真空處理室1內之排氣量、速度被調節。

於真空處理室1之基板載置台5之上方配置電漿形成用之空間，其天井面具備具有圓板形狀之石英等介電體製之微波透過窗6。

於微波透過窗6之上方具備圓筒空洞7，微波透過窗6之上面則構成圓筒空洞7之底面。

圓筒空洞7係由上方被供給電漿形成用之電場(本實施例為微波之電場)，圓筒空洞7之高度係以在圓筒空洞中共振產生圓形TE01模態之微波的方式被調整。

在微波透過窗6之下方，與其隔開間隔而在和基板載置台5呈對向之位置具備噴氣板8。

和微波透過窗6之間之間隔，係被連結於和真空處理室1外部之氣體源呈連結的未圖示之氣體供給路，來自氣體源之氣體係被導入間隔，於間隔內擴散之後，於噴氣板8之中央不通過配置於基板載置台5之對向區域的貫穿孔，而將處理用氣體分散導入真空處理室1內。

具備配置於圓筒空洞7上部之環狀板的天井面，係被連結於圓形導波管11，傳播於圓形導波管11內之微波係被導入圓筒空洞7內。

本實施例中，微波之頻率係使用工業頻率之2.45GHz。

通過圓形導波管11而傳播之微波電場，係於圓筒空洞7內以特定模態共振之電場，透過微波透過窗6及下方增噴氣板8而被供給至下方之真空處理室1內。

在真空處理室1之外部，具備包圍圓筒空洞7之上方及真空處理室1或圓筒空洞7之側方外周，而具有1系統～3系統之磁控管線圈2以及軛部3的磁場形成手段。

晶圓4之處理中直流電力被供給至磁控管線圈2，其產生之磁場則被供給至真空處理室1內。

晶圓4之處理時，通過配置於真空容器之具有開口的柵閥內，使實質具有圓板形狀的晶圓4被搬送至真空處理室1內，傳遞至基板載置台5而載置於具有圓形之基板載置面，藉由靜電被吸附保持。

於此狀態下，由排氣口藉由真空泵及導通調節閥18之動作進行排氣之同時，於真空處理室1藉由噴氣板8導入處理用氣體，藉由排氣以及介由噴氣板8導入之處理用氣體之流量速度之平衡而使真空處理室1內之壓力被調整成為所要值。

本實施例中，對應於晶圓4之處理條件可以調節成為0.05Pa～10a之間之壓力。

微波之電場透過微波透過窗6及噴氣板8被供給至真空處理室1內，或者由磁場供給手段供給磁場。

藉由彼等電場、磁場之相互作用，激發處理用氣體而使成為電漿化。

此時，藉由磁控管線圈2使引起ECR共振之強度875高斯之磁場被供給至真空處理室1內部，可產生0.05Pa~5Pa程度之壓力範圍內穩定之電漿。

於基板載置台5內配置金屬製電極，具備對該電極施加高頻偏壓電力，而於載置於基板載置台5上面之晶圓4上方形成高頻偏壓電位的手段。

藉由該高頻偏壓電位與電漿之電位差將電漿中之離子引入晶圓而促進蝕刻處理。

本實施例中，於基板載置台5另外具備：可以正確檢測出高頻偏壓之波形的電壓檢測頭30，該電壓檢測頭30被連接於分壓器31。

構成真空處理室1之真空容器為鋁等之金屬製，電氣上被接地。

於構成真空處理室1之內壁的部分，係以具有耐電漿性、而且對裝置不容易帶來金屬污染的絕緣材料、亦即，Y2O3(氧化釔)、Al2O3(氧化鋁)、Y2F3(氟化釔)、Al2F3(氟化鋁)、AlN(氮化鋁)、石英(SiO2)等陶瓷或彼等之化合物材料構成之披膜，以約50μm～500μm之厚度予以披覆。

藉由可以調節真空處理室1之溫度的構造，可以提升量產時之處理穩定性。

真空處理室1之溫度之調節，係於真空處理室1之側壁內部形成流通液體的流路，使被冷卻器等調溫後之液體流經該流路而可以實現。

或者，可於真空處理室1之大氣側具備加熱器等。

藉由彼等調溫手段將真空處理室調節於30℃～100℃之間之所要溫度。

另外，於真空處理室1之金屬壁部分埋入白金溫度計等之溫度監控手段，進行真空處理室溫度之回授控制，則更能期待處理之穩定。

具有圓板形狀之微波透過窗6之直徑稍大於上述真空處理室1之內徑，藉由O環等密封外周部而使真空處理室1內與外部大氣壓之外氣之間被氣密密封。

微波透過窗6之材質較好是微波之損失小、不容易引起污染的材質、亦即，石英、氧化鋁、氧化釔等之材質。

配置於微波透過窗6之下方的大略圓板形狀之介電體製噴氣板8之材質，係和微波透過窗6之材質同樣，較好是微波之損失小、不容易引起污染的材質、亦即，石英、氧化鋁、氧化釔等之材質。

於噴氣板8，以約5mm間距～20mm間距之間隔設置直徑約0.1mm～0.8mm之貫穿孔，其厚度被適當設為5mm～15mm之間。

於噴氣板8與微波透過窗6之間，以大約0.1mm～1mm之間隙形成間隔而成為供給處理用氣體予以擴散的氣體緩衝室，由該氣體緩衝室外周部導入之處理用氣體擴散之結果，可以抑制由貫穿孔流入真空處理室1內之流量之不均。

另外，將氣體緩衝室及噴氣板8劃分為內周部與外周部之2個區域，分別連結於其他系統之氣體供給系(未圖示)，藉由適當調節流入內周部與外周部之處理用氣體之種類、組成、流量，而可以控制到達晶圓之自由基種之分佈。

如此則，可實現更高之晶圓面內之處理均勻性。

另外，作為處理用氣體，可以對應於被蝕刻膜種類，適當選擇Cl2、HBr、HCl、CF4、CHF3、SF6、BCl3、O2、CH4等反應性氣體之中約1種類～4種類，適當調節個別之流量或混合比。

另外，亦可於彼等混合之反應性氣體添加適當流量之Ar或Xe等稀釋氣體。

圓筒空洞7之底面係構成微波透過窗6之上面，天井面則構成環狀之金屬製圓板。

於其中央部連接著圓形導波管11，而構成微波供給路徑。

微波供給路徑，係於導波管與導波管軸方向之路徑上由路徑下端朝上端，配置於上下方向具有軸的圓形導波管11、圓極化波產生器12、矩形圓形導波管轉換器13、於水平方向具有軸的矩形導波管14、微波用自動匹配器15、隔絕器16、及磁鐵17。

磁鐵17振盪之特定頻率之微波引起之電場，會介由微波用自動匹配器15而以矩形TE10模態於矩形導波管傳播，於矩形圓形導波管轉換器13被轉換為圓形TE11模態，介由圓極化波產生器12被導入圓筒空洞7。

藉由圓極化波產生器12使圓形TE11模態之極化波面旋轉而產生右旋轉圓極化波，可使圓周方向之電場分佈均勻。

另外，藉由微波用自動匹配器15取得和負荷之匹配，可使微波電力有效投入電漿負荷，可抑制反射電力。

另外，隔絕器16用於防止未被微波用自動匹配器15取入之反射波之返回磁鐵。

在真空處理室1之外部，具備1系統～3系統之磁控管線圈2以及軛部3。

本實施例中，雖未圖示，具備藉由適當調節流入磁控管線圈2之直流電流，可以調節ECR面(875高斯之等磁場面)之高度、或ECR面之形狀、磁力線之輻射狀況等之構成。

另外，藉由使用ECR共振，可於有利微細加工之約0.05Pa～5Pa之低壓力區域產生穩定之電漿，可以針對ECR高度、或ECR面之形狀、磁力線之輻射狀況等進行控制，可使電漿之密度分佈調節成為所要者。

在真空處理室1之下方具備晶圓4之載置用的基板載置台5。

基板載置台5之基材係為鋁或鈦等之金屬製，在其和構成真空容器底部的下部構件之間，藉由絕緣材29予以絕緣。

於基板載置台5內，配置介由匹配器22電連接於高頻偏壓電源23的電極，本實施例中基材被想到。

於基材之上面配置厚度約200μm～2000μm之絕緣膜層26，晶圓4被載置於基材上面之圓形載置面之狀態下，被供給高頻電力而於晶圓4形成高頻偏壓電位。

高頻偏壓電源23之電力之頻率可於200kHz～13.56MHz之間適當選擇。

基板載置台5之載置面之外周側，被配置著較載置面之絕緣膜層26之上面高度更低之環狀段差部，在被該段差部之絕緣膜層26覆蓋的部分之上方，配置著陶瓷等介電體製大略圓環狀之構件之承受器27，針對形成於真空處理室1內之電漿將基板載置台5予以覆蓋。

另外，基板載置台5之側壁部係被設為大略圓筒形之介電體製電極蓋部28覆蓋。

承受器27、電極蓋部28之材質，較好是耐電漿性高、不容易引起污染的材質、亦即，石英、高純度鋁、氧化釔等。

上述絕緣膜層26之材質為Al2O3、Y2O3、AlN或於Al2O3含有10%左右之Ti2O3者，可藉由溶射或將燒結體接著於基材上面而形成。

另外，於絕緣膜層26內部配置複數個膜狀之電極，被電連接於直流之電壓源。

晶圓4被載置於載置面之絕緣膜層26上面之狀態下，藉由對電極施加數百V～數kV之直流電力，藉由靜電力使晶圓4被吸附於絕緣膜層26上部。

在基板載置台5之具有圓板或圓筒形狀之基材內部配置基材之溫度調節用冷媒之流通用之冷媒通路25，該冷媒通路25配置成為螺旋狀或以複數圓弧狀配置於同心而不同位置。

冷媒通路25係藉由管路連結於配置於真空處理室1外部的冷卻器等之溫度調節器20，於溫度調節器20內被調節成為特定溫度的冷媒則經由冷媒通路25循環。

藉由該冷媒之流通將基板載置台5之溫度維持於適合處理之所要值之範圍。

晶圓4被載置保持於載置面之絕緣膜層26之狀態下，經由和配置於其上面之開口連通的流路，使來自導熱氣體源21的He等導熱氣體被導入絕緣膜層26之上面與晶圓4之背面之間之間隔。

藉由該導熱氣體來促進晶圓4和已調節溫度的基板載置台5或基材間之溫度傳導，使晶圓4之溫度維持於適合處理之所要值之範圍內。

本實施例中，在配置於基板載置台5之載置面外周的段差部所載置承受器27內部配置著電壓檢測頭30，用於檢測施加高頻偏壓時承受器27或晶圓4上方所產生之偏壓之峰值之差((PeaktoPeak)，最大值與最小值之差)Vpp及自偏壓Vdc之值。

電壓檢測頭30被配置於承受器27之上面，被配置於和上方之真空處理室1內所形成電漿呈面對的開口之內部，其上面被保持於和承受器27之上面同一位置，或者以和基板載置台5之載置面上的絕緣膜層26之上面或其所載置狀態之晶圓4之上面實質上成為同一高度的方式被配置。

本實施例之電壓檢測頭30，係配置於電極、亦即，基材之載置面外周側部分的環狀段差部之上方，和晶圓4同樣藉由供給至基材之高頻電力而於上方形成偏壓電位。

另外，電壓檢測頭30，係於真空處理室1之外側，被電連接於設置於基板載置台5正下方之分壓器31之輸入側。

為能不紊亂而測定產生於電壓檢測頭30之高頻偏壓之電壓波形及直流之電壓，分壓器31之輸入阻抗較好是1MΩ以上，輸入容量較好是50pF以下。

電壓檢測頭30上產生之偏壓波形係被輸入分壓器31，酸衰減為約1/100之後，被輸出至配置於真空處理室1外部的控制PC101之輸出入介面之一的AD埠。

控制PC，係由內部運算器輸入之信號運算出電壓波形，並抽出電壓波形之Vpp成份及Vdc成份。

控制PC，係依據內部或可經由通信手段通信的記憶裝置所記憶之軟體或資料，以使蝕刻中Vpp/2+|Vdc|之值成為一定的方式藉由運算器檢測出高頻偏壓電源23之輸出值，對高頻偏壓電源23發出指令而使該值被輸出。

控制PC為本實施例之控制部，雖未圖示，可以通信連接於本實施例之電漿處理裝置之電磁場供給手段、排氣手段、基板載置台5、溫度調節器20、分壓器31等之各動作部位或介由通信手段可以和感測器等檢測手段連接，由受診之檢測手段之信號，依據運算器所檢測出之電漿處理裝置之動作之狀態，對各動作部位發出適當之動作指令，而調節電漿處理裝置之動作。

如上述說明，射入晶圓之離子能量分佈IEDF之高能量峰值成份可以預估為Vpp/2+|Vdc|，因此，隨蝕刻之進行，腔室壁之狀態或環境即使變化，藉由進行上述控制可使上述IEDF之高能量峰值成份不變化。

如此則，可依據時間將IEDF之高能量峰值控制於一定，可對應於次世代之微細化而實現高精確度加工及長期穩定。

以下使用圖2-4說明電壓檢測頭30之構造之詳細。

圖2表示圖1之實施例之電壓檢測頭30安裝於基板載置台5之狀態之斷面圖。

特別是，如圖1虛線部分之承受器27及其周邊部分之擴大圖。

圖3表示圖2之電壓檢測部30之構成之概略模式之斜視圖。

圖4表示電壓檢測頭30配置於承受器27內部之狀態由上看之平面圖。

如圖2、3所示，電壓檢測頭30為被分割而具備可以交換的上部構件32及下部構件33之構成。

在配置於基板載置台5之載置面外周部的段差部，被配置著直徑5mm～10mm之貫穿孔。

於該貫穿孔內部，被插入絕緣軟管34，將內外予以電絕緣。

下部構件33具有金屬製之大直徑之圓板，具備於絕緣軟管34之上端部開口內被插入下部構件33而予以保持之構成。

下部構件33，係具有直徑10mm～50mm、厚度1mm～5mm程度之大略圓板形狀之金屬板，其下面被接合環狀或圓筒狀之座部35之構造。

於座部35內部被插入、保持著栓塞36而和金屬板呈電連接。

栓塞36之下端部連接於信號線37之前端，信號線37之另一端部被連接於分壓器31之輸入側。

於下部構件33之上部具備可裝拆之上部構件32。

上部構件32，係在和下部構件33之圓板部大略同一直徑之圓板上，以同心重疊直徑較其小的圓柱之形狀而被形成為一體。

上部構件32之圓柱部分之上面之直徑為4mm～40mm。

於上部構件32係和晶圓4同樣被施加高頻電力，於上方形成偏壓電位，長期間使用後因為荷電粒子之衝突而消耗。

因此，上部構件32設為容易裝拆、交換之構造。

另外，本實施例之上部構件32之材質為對晶圓不容易引起金屬污染、而且導電率高的材質，亦即可使用摻雜著硼(B)或磷(P)之電阻係數1Ωcm以下之矽。

於上部構件32之大直徑圓板部下面，藉由針對鋁實施濺鍍蒸鍍熱處理，而使接觸於下部構件33時之直流之電氣接觸更確實。

另外，承受器27，係配合和上部構件32、下部構件33接觸狀態下之形狀而配置具有段差之貫穿孔，在將上部構件32重疊於下部構件33之狀態下，嵌入保持於承受器27之貫穿孔。

此狀態下，上部構件32之上部之圓柱部之上面被設為和承受器27之上面同一高度。

如圖4所示，上部構件32對於晶圓4之外周緣需要配置於適當位置，但是上部構件32過度接近晶圓4之外緣(邊緣)時，受到上部構件32之影響有可能惡化晶圓4之邊緣部附近之蝕刻特性(速度、垂直性等)。

另外，上部構件32離晶圓4之邊緣太遠時，晶圓4上之電漿狀態與電壓檢測頭30之上部構件32上之電漿狀態之差異變大，Vpp、Vdc之高精確度測定變為困難。

本實施例中上部構件32配置於滿足以下關係之位置。

0.5×B＜A＜3.0×B 其中，A為晶圓4之邊緣至電壓檢測頭30之上部構件32之上部圓柱部之上端之間之距離，本實施例中成為和承受器27之貫穿孔連通的上面開口之間之距離。

B為電壓檢測頭30之上部構件32之上部圓柱部之直徑，本實施例中係和上述開口之直徑同等。

亦即，上述條件為，晶圓4或面臨電漿之電壓檢測頭30之上端與晶圓4之間水平方向之距離被設為電壓檢測頭30之上端部直徑之1/2～3倍之範圍內。

欲使用此種電壓檢測頭30精密測定高頻偏壓之Vpp及Vdc時，除了需要晶圓4正上方之電漿密度與電壓檢測頭30正上方之電漿密度不存在大的差異以外，亦需要將施加於電壓檢測頭30之偏壓設為和晶圓4同等。

晶圓4係介由絕緣膜層26和基板載置台5之基材間進行容量耦合。

本實施例中設定該靜電容量為C1(pF)，晶圓4之面積設為S1(cm2)，電壓檢測頭之上面之面積設為S2(cm2)時，電壓檢測頭30或其導電體構件部分和基板載置台5或電極之基材間耦合產生之靜電容量C2設為C2=S2×C1/S1。

相較於該值在C2為極小時，高頻偏壓幾乎未被施加於電壓檢測頭30。

反之，相較於該值在C2為極大時，施加於晶圓4之偏壓電壓以上的電壓會被施加於電壓檢測頭30。

依據上述實施例，使用電壓檢測頭30檢測出之結果，可以高精確度預測產生於晶圓4之偏壓波形。

亦即，可以簡單現場(In-situ)檢測出產生於晶圓4之Vdc。

使用該檢測結果，以使Vpp/2+|Vdc|成為一定的方式進行調節，將IEDF之高能量峰值對應之離子能量控制成為一定，則可以提供兼具備對應於次世代之微細化的高精確度加工與長期穩定性之電漿處理裝置。

又，上述說明之電漿源係以磁場微波ECR裝置為例，但本發明不限定於此，只要是對晶圓施加偏壓之形態，即使是平行平板型、感應耦合型亦可獲得本發明之效果。

1．．．真空處理室 2．．．磁控管線圈 3．．．軛部 4．．．晶圓 5．．．基板載置台 6．．．微波透過窗 7．．．圓筒空洞 8．．．噴氣板 11．．．圓形導波管 12．．．圓極化波產生器 13．．．矩形圓形導波管轉換器 14．．．矩形導波管 15．．．微波用自動匹配器 16．．．隔絕器 17．．．磁鐵 18．．．導通調節閥 19．．．渦輪分子泵 20．．．溫度調節器 21．．．導熱氣體源 22．．．匹配器 23．．．高頻偏壓電源 25．．．冷媒通路 26．．．絕緣膜層 27．．．承受器 28．．．電極蓋部 29．．．絕緣材 30．．．電壓檢測頭 31．．．分壓器 32．．．上部構件 33．．．下部構件 34．．．絕緣軟管 35．．．座部 36．．．栓塞 37．．．信號線 圖1表示本發明實施例之電漿處理裝置之構成之概略縱斷面圖。

圖2表示圖1之實施例之電壓檢測頭之構成之概略縱斷面圖。

圖3表示圖2之電壓檢測部之構成之概略模式之斜視圖。

圖4表示圖2之電壓檢測頭配置於承受器內部之狀態由上看之平面圖。

圖5表示任意形狀之晶圓表面中之偏壓波形與離子能量分佈函數(IEDF)之模式表示圖。

1．．．真空處理室 2．．．磁控管線圈 3．．．軛部 4．．．晶圓 5．．．基板載置台 6．．．微波透過窗 7．．．圓筒空洞 8．．．噴氣板 11．．．圓形導波管 12．．．圓極化波產生器 13．．．矩形圓形導波管轉換器 14．．．矩形導波管 15．．．微波用自動匹配器 16．．．隔絕器 17．．．磁鐵 18．．．導通調節閥 19．．．渦輪分子泵 20．．．溫度調節器 21．．．導熱氣體源 22．．．匹配器 23．．．高頻偏壓電源 25．．．冷媒通路 26．．．絕緣膜層 27．．．承受器 28．．．電極蓋部 29．．．絕緣材 30．．．電壓檢測頭 31．．．分壓器 101．．．控制PC Claims(6) 一種電漿處理裝置，具備：處理室，配置於真空容器內，於內部形成電漿；載置台，配置於該處理室內，於其上部之載置面載置處理對象晶圓；及電源，用於供給高頻電力而在配置於該載置台內部的電極形成偏壓電位；由上述電源供給上述高頻電力之同時，使用上述電漿來處理上述晶圓者；其特徵為具備：檢測器，被配置於上述載置台之上述載置面外周側，由形成於其上方之上述偏壓之電壓值檢測出最大值與最小值之差之成份Vpp以及直流成份Vdc；及控制器，其依據該檢測器之輸出，於上述處理中以使Vpp/2+|Vdc|之值成為一定的方式，來調節高頻偏壓電力之輸出。

如申請專利範圍第1項之電漿處理裝置，其中上述檢測器，其上端係被設為和上述載置面之上面或者載置於其之狀態下上述晶圓上面實質上同一高度而面向上述電漿，將上述載置台與上述檢測器之間的單位面積之靜電耦合容量，設為和上述載置台與上述晶圓之間的單位面積之靜電耦合容量相等。

如申請專利範圍第1或2項之電漿處理裝置，其中上述檢測器之面向上述電漿的部分，係使上述晶圓被載置、保持於上述載置面狀態下與該晶圓外周緣之間之距離，設定成為面向上述電漿之部分之1/2～3倍之範圍內。

一種電漿處理方法，係在真空容器內之處理室所配置載置台之上部之載置面將處理對象之晶圓予以載置，於上述處理室內部形成電漿，供給高頻電力而由和配置於上述載置台內部的電極呈電連接之電源形成偏壓電位，使用上述電漿進行上述晶圓之處理者；其特徵為：依據檢測器之輸出，該檢測器係配置於上述載置台之上述載置面外周側，而由形成於其上方之上述偏壓之電壓值檢測出最大值與最小值之差之成份Vpp以及直流成份Vdc者，於上述處理中以使Vpp/2+|Vdc|之值成為一定的方式，來調節高頻偏壓電力之輸出。

如申請專利範圍第4項之電漿處理方法，其中上述檢測器，其上端係被設為和上述載置面之上面或者載置於其之狀態下上述晶圓上面實質上同一高度而面向上述電漿，將上述載置台與上述檢測器之間的單位面積之靜電耦合容量，設為和上述載置台與上述晶圓之間的單位面積之靜電耦合容量相等。

如申請專利範圍第4或5項之電漿處理方法，其中上述檢測器之面向上述電漿的部分，係使上述晶圓被載置、保持於上述載置面狀態下與該晶圓外周緣之間之距離，被設為面向上述電漿之部分之1/2～3倍之範圍內。

TW100134776A 2011-08-15 2011-09-27 Plasmaprocessingdeviceandplasmaprocessingmethod TWI484524B (zh) PriorityApplications(1) ApplicationNumber PriorityDate FilingDate Title JP2011177387A JP5898882B2 (ja) 2011-08-15 2011-08-15 プラズマ処理装置およびプラズマ処理方法 Publications(2) PublicationNumber PublicationDate TW201308392A true TW201308392A (zh) 2013-02-16 TWI484524B TWI484524B (zh) 2015-05-11 Family ID=47712937 FamilyApplications(1) ApplicationNumber Title PriorityDate FilingDate TW100134776A TWI484524B (zh) 2011-08-15 2011-09-27 Plasmaprocessingdeviceandplasmaprocessingmethod CountryStatus(4) Country Link US (1) US20130045604A1 (zh) JP (1) JP5898882B2 (zh) KR (1) KR101444228B1 (zh) TW (1) TWI484524B (zh) CitedBy(1) *Citedbyexaminer,†Citedbythirdparty Publicationnumber Prioritydate Publicationdate Assignee Title TWI492262B (zh) * 2013-06-06 2015-07-11 HitachiHighTechCorp Plasmaprocessingdeviceandplasmaprocessingmethod FamiliesCitingthisfamily(6) *Citedbyexaminer,†Citedbythirdparty Publicationnumber Prioritydate Publicationdate Assignee Title KR20160124992A (ko) * 2015-04-20 2016-10-31 삼성전자주식회사 기판제조장치,및그의세라믹박막코팅방법 JP6434617B2 (ja) * 2015-05-22 2018-12-05 株式会社日立ハイテクノロジーズ プラズマ処理装置およびそれを用いたプラズマ処理方法 GB201615114D0 (en) * 2016-09-06 2016-10-19 SptsTechnologiesLtd AMethodandsystemofmonitoringandcontrollingdeformationofawafersubstrate JP6932070B2 (ja) * 2017-11-29 2021-09-08 東京エレクトロン株式会社 フォーカスリング及び半導体製造装置 JP2019114591A (ja) * 2017-12-21 2019-07-11 株式会社日立ハイテクノロジーズ プラズマ処理装置およびプラズマ処理方法 CN111503383A (zh) * 2019-01-30 2020-08-07 中微半导体设备(上海)股份有限公司 一种可变形气体管道及其所在的真空处理器 FamilyCitesFamilies(14) *Citedbyexaminer,†Citedbythirdparty Publicationnumber Prioritydate Publicationdate Assignee Title JPS6285431A (en) * 1985-10-09 1987-04-18 HitachiLtd Dryetchingapparatus JP2830978B2 (ja) * 1990-09-21 1998-12-02 忠弘大見 リアクティブイオンエッチング装置及びプラズマプロセス装置 KR100290748B1 (ko) * 1993-01-29 2001-06-01 히가시데쓰로 플라즈마처리장치 US6328845B1 (en) * 1993-03-18 2001-12-11 Hitachi,Ltd. 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Voltagecontrolsensorandcontrolinterfaceforradiofrequencypowerregulationinaplasmareactor US6727655B2 (en) * 2001-10-26 2004-04-27 McchesneyJon Methodandapparatustomonitorelectricalstatesataworkpieceinasemiconductorprocessingchamber JP5372419B2 (ja) * 2008-06-25 2013-12-18 株式会社日立ハイテクノロジーズ プラズマ処理装置及びプラズマ処理方法 JP5207892B2 (ja) * 2008-09-11 2013-06-12 東京エレクトロン株式会社 ドライエッチング方法 JP5059792B2 (ja) * 2009-01-26 2012-10-31 東京エレクトロン株式会社 プラズマ処理装置 2011 2011-08-15 JP JP2011177387A patent/JP5898882B2/ja not_active Expired-FeeRelated 2011-09-19 US US13/235,666 patent/US20130045604A1/en not_active Abandoned 2011-09-27 TW TW100134776A patent/TWI484524B/zh active 2011-09-28 KR KR1020110098304A patent/KR101444228B1/ko active IPRightGrant CitedBy(4) *Citedbyexaminer,†Citedbythirdparty Publicationnumber Prioritydate Publicationdate Assignee Title TWI492262B (zh) * 2013-06-06 2015-07-11 HitachiHighTechCorp Plasmaprocessingdeviceandplasmaprocessingmethod US9336999B2 (en) 2013-06-06 2016-05-10 HitachiHigh-TechnologiesCorporation Plasmaprocessingapparatusandplasmaprocessingmethod US10192718B2 (en) 2013-06-06 2019-01-29 HitachiHigh-TechnologiesCorporation Plasmaprocessingapparatusandplasmaprocessingmethod US11004658B2 (en) 2013-06-06 2021-05-11 HitachiHigh-TechCorporation Plasmaprocessingapparatusandplasmaprocessingmethod AlsoPublishedAs Publicationnumber Publicationdate JP2013041953A (ja) 2013-02-28 JP5898882B2 (ja) 2016-04-06 KR20130018457A (ko) 2013-02-25 KR101444228B1 (ko) 2014-09-26 TWI484524B (zh) 2015-05-11 US20130045604A1 (en) 2013-02-21 SimilarDocuments Publication PublicationDate Title TWI484524B (zh) 2015-05-11 Plasmaprocessingdeviceandplasmaprocessingmethod US10090160B2 (en) 2018-10-02 Dryetchingapparatusandmethod US7658816B2 (en) 2010-02-09 Focusringandplasmaprocessingapparatus TWI593016B (zh) 2017-07-21 Plasmatreatmentmethod JP2006507662A (ja) 2006-03-02 プラズマ処理システム内のアーク抑制方法およびシステム CN107710378B (zh) 2020-05-26 多电极基板支撑组件与相位控制系统 KR20010087195A (ko) 2001-09-15 플라즈마처리장치및플라즈마처리방법 JP2010016124A (ja) 2010-01-21 プラズマ処理装置およびプラズマ処理方法 KR20160059976A (ko) 2016-05-27 측정시스템및측정방법 JP2008516426A (ja) 2008-05-15 プラズマ・エッチング均一性を改良するための方法および装置 JP3150058B2 (ja) 2001-03-26 プラズマ処理装置及びプラズマ処理方法 JP2003224112A (ja) 2003-08-08 プラズマ処理装置及びプラズマ処理方法 JP4694130B2 (ja) 2011-06-08 プラズマ処理装置 JP5740246B2 (ja) 2015-06-24 プラズマ処理装置およびプラズマ処理方法 KR100279656B1 (ko) 2001-02-01 플라즈마처리장치및플라즈마처리방법 CN109216144A (zh) 2019-01-15 一种具有低频射频功率分布调节功能的等离子反应器 US20190318918A1 (en) 2019-10-17 Plasmaprocessingapparatus,plasmacontrolmethod,andcomputerstoragemedium JP2011014579A (ja) 2011-01-20 プラズマ処理装置及びプラズマ処理方法 JP3642773B2 (ja) 2005-04-27 プラズマ処理方法およびプラズマ処理装置 US20170213703A1 (en) 2017-07-27 Plasmaprocessingapparatusandcontrolmethod US20210166920A1 (en) 2021-06-03 Plasmaprocessingapparatusandmeasurementmethod US11062882B2 (en) 2021-07-13 Plasmaprocessingapparatusandplasmaprocessingmethod JP2000348897A (ja) 2000-12-15 プラズマ処理装置 KR20210097027A (ko) 2021-08-06 플라즈마처리장치및플라즈마처리방법 KR20160129300A (ko) 2016-11-09 유도결합형플라즈마발생장치용안테나및그의제어방법과그를포함하는유도결합플라즈마발생장치