Lam Research - Wikipedia
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Lam Research Corporation is an American supplier of wafer fabrication equipment and related ... "Tool Order: Novellus ships 300th SABRE ECD system". fabtech.com. LamResearch FromWikipedia,thefreeencyclopedia Thisisthelatestacceptedrevision,reviewedon21November2021. Jumptonavigation Jumptosearch Americansemiconductorequipmentcompany LamResearchCorporationTypePublicTradedasNasdaq: LRCXNASDAQ-100ComponentS&P500ComponentIndustrySemiconductorsFounded1980;41 yearsago (1980)FounderDavidK.LamHeadquartersFremont,California,UnitedStatesKeypeopleTimArcher,CEOandPresidentStephenG.Newberry,ChairmanoftheBoardProductsSemiconductormanufacturingproductsRevenueUS$9.65 billion(2019)[1]US$11.08 billion(2018)[1]OperatingincomeUS$2.45 billion(2019)[1]US$3.15 billion(2018)[1]NetincomeUS$2.19 billion(2019)[1]US$2.38 billion(2018)[1]TotalassetsUS$12.00 billion(2019)[1]US$12.48 billion(2018)[1]TotalequityUS$4.67 billion(2019)[1]US$6.50 billion(2018)[1]Numberofemployees14,100(August2021)[2]Websitewww.lamresearch.com LamResearchCorporationisanAmericansupplierofwaferfabricationequipmentandrelatedservicestothesemiconductorindustry.[3]Itsproductsareusedprimarilyinfront-endwaferprocessing,whichinvolvesthestepsthatcreatetheactivecomponentsofsemiconductordevices(transistors,capacitors)andtheirwiring(interconnects).Thecompanyalsobuildsequipmentforback-endwafer-levelpackaging(WLP),andforrelatedmanufacturingmarketssuchasformicroelectromechanicalsystems(MEMS). LamResearchwasfoundedin1980byDr.DavidK.LamandisheadquarteredinFremont,California,intheSiliconValley.[4]Asof2018,itwasthesecondlargestmanufacturerintheBayArea,afterTesla.[5] Contents 1History 2Products 2.1Thinfilmdeposition 2.2Plasmaetch 2.3Photoresiststrip 2.4Wafercleaning 3LamCapital 4Customers 5Facilities 6References 7Externallinks History[edit] LamResearchwasfoundedin1980byDavidK.Lam,aChinese-bornengineerwhohadpreviouslyworkedatXerox,Hewlett-PackardandTexasInstruments.[6]ItwaswhilehewasatHewlettPackardthathesawtheneedforbetterplasmaetchingequipment,tokeepupwiththerapidminiaturizationofsemiconductorwafers.[6]HecreditedBobNoyce,founderofIntel,forassistinghimingettingfundingbyensuringhisbusinessplanmadesense. In1981,thecompanyintroduceditsfirstproduct,theAutoEtch480,anautomatedpolysiliconplasmaetcher.ThenameAutoEtchwaschosentoconveythattheetcherwasautomated,whilethe80in480camefrom1980,theyearthecompanywasfounded.[7]ThefirstsystemwassoldinJanuary1982.[8]In1982,RogerEmerickwasappointedCEO.[9] InMay1984,thecompanyissuedanIPOandwaslistedonNASDAQ,withthesymbolLRCX.[citationneeded]In1985,DavidLamleftthecompanytojoinLinkTechnologies,whicheventuallywasboughtbyWyse[10]andisnowDellWyse.[11]Inthemid-1980s,LamResearchcontinueditsglobalexpansion,concentratingonTaiwanandalsoopeningcustomersupportcentersthroughoutEurope,theUnitedStatesandJapan.[11] Bytheearly1990s,thecompanyhadapresenceinChina,Korea,Singapore,andTaiwan.[11]InMarch1997,thecompanypurchasedOnTrakSystemsInc.,achipequipmentmanufacturerthatspecializedinchemical-mechanicalplanarization(CMP)cleaning,for$225Million.[12]CMPcleaningisahybridprocesstosmoothsurfacesusingbothetchingandmechanicalpolishing.InAugust1997,thecompanynamedOnTrak'sCEOJimBagleyasitsCEO.[11][13]In1998,Bagleywasnamedchairmanoftheboard.[13] In2005,SteveNewberrywasappointedasCEO.[14]In2006,LamResearchacquiredBullenSemiconductor,nowSilfex,Inc.[15]In2008,LamResearchacquiredSEZAG,[16]nowLamResearchAG.[17]In2011,LamResearchagreedtobuySanJose,CaliforniachipequipmentmanufacturerNovellusSystems,for$3.3B.[18]ThedealwascompletedinJune2012.[19]In2012,MartinAnsticewasappointedasCEO.[14]InOctober2015,LamResearchannouncedplanstobuyMilpitas,California-basedwaferinspectionequipmentvendorKLA-Tencorfor$10.6B,inwhatwasviewedasasemiconductorindustryconsolidationmove.[20]InJune2016,itwasannouncedthatLamResearchhadjoinedtheFortune500forthefirsttime.[21]InOctober2016,thecompanyannouncedithadterminateditsofferforKLA-TencoramidstconcernsthatthedealwouldnotmeetregulatoryapprovalfromtheU.S.DepartmentofJustice[22]overantitrustconcerns.[23] InSeptember2017,thecompanyannouncedtheacquisitionofCary,NorthCarolina-basedchipsimulationfirmCoventor.Thecompany'ssoftwarereportedlywouldallowLamtoreducethetimetomarketforitsnewchips.[24]InNovember,thecompanylaunchedLamResearchCapital(LamCapital),aventurecapitalgroupcharteredtoinvestincompanies.[25] InJanuary2018,thecompanyannouncedthatCOOTimArcherwasbeingpromotedtopresident,andCEOMartinAnsticewasremainingintheCEOrole.[26] InDecember2018,MartinAnsticeresignedasCEOduetoallegationsofpersonalmisconductandtheBoardofDirectorsofLamResearchnamedTimArcheraspresidentandchiefexecutiveofficer.[27]ArcherwasalsoappointedtotheBoardofDirectorsofLamResearch.Priortothisappointment,Archerwasthecompany'spresidentandchiefoperatingofficer.[28] InAugust2021,LamopenedamanufacturingfacilityinBatuKawan,Malaysiatomeetgrowingdemandforwaferfabricationequipmentandtobetoworkmorecloselywithkeycustomersandsupplychainpartners.[29] Products[edit] LamResearchdesignsandbuildsproductsforsemiconductormanufacturing,includingequipmentforthinfilmdeposition,plasmaetch,photoresiststrip,andwafercleaningprocesses.Repeatedthroughoutsemiconductormanufacturing,thesetechnologieshelpcreatetransistors,interconnects,advancedmemory,andpackagingstructures.Theyarealsousedforapplicationsinrelatedmarketslikemicroelectromechanicalsystems(MEMS)andlight-emittingdiodes(LEDs).[1] Thinfilmdeposition[edit] Lam'sthinfilmdepositionsystemslaydownthesub-microscopiclayersofconducting(metal)orinsulating(dielectric)materialsthatmakeupanintegratedcircuit.Theprocessesrequireuniformityatthenanoscalelevel.[30] Thecompanyemployselectrochemicaldeposition(ECD)andchemicalvapordeposition(CVD)technologiestoformcopperandothermetalfilmsforconductingstructures.[31][32]Atomiclayerdeposition(ALD)isalsousedfortungstenmetalfilmsinfeatureslikecontactsandplugs,whichareverticalconnectionsbetweenmetallinesinmultilevelinterconnectchipdesigns. Plasma-enhanced(PE)CVDandALDtechnologiescreatedielectricfilmsforawiderangeofinsulatingparts.Forgapfillprocesses,whichrequiredepositingdielectricmaterialintonarrowspaces,Lamuseshigh-densityplasma(HDP)CVDtechnology.PECVDandALDarealsousedtoformhardmasks,layerswhichcanberemovedtoimprovecircuitpatterningprocesses. Plasmaetch[edit] LamResearchusesproprietarytechnologyinitsequipmentforplasmaetch,[33]theprocessofselectivelyremovingmaterialsfromthesurfaceofawaferinordertocreatethesemiconductordevice'sfeaturesandpatterns.Theequipmenthelpschipmanufacturerscarvesmallfeaturessuchasthoseneededforthelatestmultiplepatterningsequences,transistors,andadvancedmemorystructures,whichinvolveincreasinglycomplexfilmstacksandeverhigheraspectratiostructures. Thecompanyusesreactiveionetch(RIE)andatomiclayeretching(ALE)toshapeavarietyofconductiveanddielectricfeatures.[33]Thecompany'sdeepRIEtechnologieshelpcreatestructuresforapplicationslikeMEMSandthrough-siliconvias(TSVs). Photoresiststrip[edit] Lam'sdrystripsystemsuseplasmatechnologytoselectivelyremovethephotoresistmaskfollowingarangeoffront-endwaferprocessingandadvancedpackagingapplications.[34] Wafercleaning[edit] LamResearch'swetspincleanandplasma-basedbevelcleanproductsremoveparticles,residues,andfilmsfromthewafersurfacebeforeorafteradjacentprocesses.[35] Thecompany'sspinwetcleantechnologyisusedbetweenchip-processingstepstoremoveyield-limitingresiduesanddefects.Lam'sbevelcleantechnologydirectsaplasmaattheveryedgeofthewafertocleanunwantedparticles,residues,andfilms.Ifnotremoved,thesematerialscanimpactyieldiftheyflakeoffandre-depositonthedeviceareaduringsubsequentmanufacturingsteps. LamCapital[edit] Thecompany'sLamCapitalinvestmentgroupinvestsinsemiconductor-relatedbusinesses,includingthoseinthefieldsoflifesciencesandindustrialautomation.[25] Customers[edit] ThecompanymarketsitsproductsandservicesprimarilytocompaniesinvolvedintheproductionofsemiconductorsintheUnitedStates,EuropeandAsia.[36] Lam'ssignificantcustomersincludeIntel;Kioxia;MicronTechnology;SamsungElectronics;SKHynix;TSMC;andYangtzeMemoryTechnologies.[37] Facilities[edit] LamhasmanufacturingfacilitiesintheUnitedStates,Austria,andKoreaandsalesandservicesofficesthroughouttheUnitedStates,Europe,andAsia.[38] References[edit] ^abcdefghijk"LamResearch2019AnnualReport".lamresearch.com.20August2019.Retrieved30August2019. ^Form10-K2020/21 ^"LAMRESEARCHCORP(LRCX:NASDAQGS):CompanyDescription".BloombergL.P.Retrieved19May2016. ^"LamResearchontheForbesAmerica'sLargestPublicCompaniesList".Forbes.Retrieved10May2018. ^https://www.bizjournals.com/sanfrancisco/subscriber-only/2018/08/10/largest-manufacturers-in-the-greater.html[bareURL] ^ab"OralHistory:DavidK.Lam".SEMI.ORG.2011.Retrieved9August2011. ^"SEMIOralHistoryInterview".stanford.edu.24July2007.Archivedfromtheoriginalon11November2013.Retrieved12May2016. ^"LamResearchCorporation–10-K".lamresearch.com.18September1996.Retrieved12May2016. ^"ExecutiveProfile–RogerD.Emerick".BloombergL.P.Retrieved2June2016. ^"PCsTriggerNewResponse".Computerworld.11January1988.Retrieved12May2016. ^abcd"LamResearchCorporationHistory".fundinguniverse.com.Retrieved12May2016. ^"LamResearchAgreestoAcquireOnTrak".LosAngelesTimes.25March1997.Retrieved12May2016. ^ab"lamresearchcorp(LRCX:NASDAQGS)".BloombergL.P.Retrieved12May2016. ^ab"Lam'sNewberrytoresignCEOpost".eetimes.com.8September2011.Retrieved3June2016. ^"CompanyOverviewofSilfex,Inc".BloombergL.P.Retrieved3June2016. ^"LambuysSEZfor$568million".eetimes.com.11December2007.Retrieved3June2016. ^"LAMResearchAG".ecsel-austria.net.Retrieved3June2016. ^"LamResearchAgreestoBuyNovellusSystemsfor$3.3Billion".BloombergL.P.15December2011.Retrieved12May2016. ^"LamResearch(LRCX)CompletesAcquisitionofNovellusSystems(NVLS)".streetinsider.com.4June2012.Retrieved12May2016. ^"LamBuysKLA-TencorasChip-SectorDealsMount".TheWallStreetJournal.21October2015.Retrieved13May2016. ^"HereAreThe15NewCompaniesJoiningTheFortune500".Fortune.6June2016.Retrieved7June2016. ^"ChipequipmentmakerLamResearchcallsoffKLA-Tencordeal".Reuters.5October2016.Retrieved6October2016. ^Mattioli,Dana;Benoit,David(19January2017)."ActivistInvestorPressesRudolphTechnologies,NanometricstoMerge".TheWallStreetJournal.NewYork.Retrieved23January2017. ^"LamBuysSimulationSoftwareFirmCoventor".eetimes.com.1September2017.Retrieved8June2018. ^ab"TheWeekInReview:Manufacturing".semiengineering.com.17November2017.Retrieved8June2018. ^"BRIEF-LamResearchPromotesTimArcherToPresident".Reuters.24January2018.Retrieved8June2018. ^"LamResearchCorporationAnnouncesMartinAnsticeResignsasChiefExecutiveOfficer;TimArcherAppointedasPresidentandChiefExecutiveOfficer|LamResearchCorporation". ^"LamResearchCEOMartinAnsticeResigns".BusinessInsider.12May2018.Retrieved6December2018. ^PRNewswire,StaffWriter(4August2021)."LamResearchStrengthensGlobalManufacturingNetworkbyOpeningItsLargestManufacturingFacilityinMalaysia".YahooFinance.PRNewswire. ^"TheWeekInReview:Manufacturing".semiengineering.com.11April2014.Retrieved19May2016. ^"ToolOrder:Novellusships300thSABREECDsystem".fabtech.com.23September2008.Retrieved13May2016. ^"DealingWithAtoms".semiengineering.com.13July2015.Retrieved19May2016. ^ab"AtomicLayerEtchnowinFabEvaluations".semimd.com.4August2014.Archivedfromtheoriginalon15July2017.Retrieved3June2016. ^"Photoresiststripmethodforlow-kdielectricsUS8058178B1".15November2011.Retrieved3June2016. ^"Etch+clean:LamResearchwideningscopewithSEZbuy".electroiq.com.11December2007.Retrieved3June2016. ^"LamResearchCorporation(LRCX)".Yahoo!.Retrieved19May2016. ^"LAMRESEARCHCORPORATIONFORM10-K"(PDF).Retrieved29August2021. ^"LamResearchCorporationlocations".lamresearch.com.Retrieved3June2016. Externallinks[edit] BusinessdataforLamResearch:GoogleFinanceYahoo!FinanceSECfilings Companiesportal SanFranciscoBayAreaportal vteCompaniesoftheNasdaq-100index ActivisionBlizzard Adobe AdvancedMicroDevices AlignTechnology Alphabet Amazon AEP Amgen AnalogDevices Ansys Apple AppliedMaterials ASMLHolding Atlassian Autodesk AutomaticDataProcessing Baidu Biogen BookingHoldings Broadcom CadenceDesignSystems CDW Cerner CharterCommunications CheckPoint Cintas CiscoSystems Cognizant Comcast Copart Costco CrowdStrike CSX Dexcom DocuSign DollarTree eBay ElectronicArts Exelon Fastenal Fiserv FoxCorporation GileadSciences Honeywell IdexxLaboratories Illumina Incyte Intel Intuit IntuitiveSurgical JD.com KeurigDrPepper KLACorporation KraftHeinz LamResearch LululemonAthletica MarriottInternational MarvellTechnologyGroup MatchGroup MercadoLibre MetaPlatforms MicrochipTechnology MicronTechnology Microsoft Moderna MondelezInternational MonsterBeverage NetEase Netflix Nvidia NXPSemiconductors O'ReillyAutoParts Okta Paccar Paychex PayPal PelotonInteractive PepsiCo Pinduoduo Qualcomm RegeneronPharmaceuticals RossStores Seagen SiriusXM SkyworksSolutions Splunk Starbucks Synopsys T-MobileUS Tesla TexasInstruments Trip.comGroup Verisign VeriskAnalytics VertexPharmaceuticals WalgreensBootsAlliance Workday XcelEnergy Xilinx ZoomVideoCommunications vteMajorsemiconductorcompaniesCompanieswithanannualrevenueofoverUS$3billion ASEGroup AnalogDevices Fujitsu InfineonTechnologies IntegratedMicro-Electronics,Inc. Intel MicrochipTechnology NXPSemiconductors(Freescale) ONSemiconductor Panasonic RenesasElectronics SamsungElectronics SkyworksSolutions Sony STMicroelectronics TexasInstruments Fabless AdvancedMicroDevices AmpereComputing AppleInc. BroadcomInc. HiSilicon MarvellTechnologyGroup MediaTek Nvidia Qualcomm VIATechnologies Memory SamsungElectronics SKHynix MicronTechnology Kioxia WesternDigital NanyaTechnology Foundries TSMC SamsungFoundry UMC GlobalFoundries SMIC Equipment ASML AppliedMaterials KLA LamResearch TokyoElectron Seealso LargestITcompanies Semiconductorindustry Category:Semiconductorcompanies Authoritycontrol ISNI 1 Retrievedfrom"https://en.wikipedia.org/w/index.php?title=Lam_Research&oldid=1056384611" Categories:CompaniesintheNASDAQ-100CompanieslistedontheNasdaqCompaniesbasedinFremont,CaliforniaElectronicscompaniesestablishedin19801980establishmentsinCaliforniaEquipmentsemiconductorcompaniesTechnologycompaniesbasedintheSanFranciscoBayArea1980sinitialpublicofferingsVenturecapitalfirmsoftheUnitedStatesHiddencategories:AllarticleswithbareURLsforcitationsArticleswithbareURLsforcitationsfromNovember2021ArticleswithshortdescriptionShortdescriptionisdifferentfromWikidataWikipediapendingchangesprotectedpagesUsedmydatesfromSeptember2020AllarticleswithunsourcedstatementsArticleswithunsourcedstatementsfromAugust2021ArticleswithISNIidentifiers Navigationmenu Personaltools NotloggedinTalkContributionsCreateaccountLogin Namespaces ArticleTalk Variants expanded collapsed Views ReadEditViewhistory More expanded collapsed Search Navigation MainpageContentsCurrenteventsRandomarticleAboutWikipediaContactusDonate Contribute HelpLearntoeditCommunityportalRecentchangesUploadfile Tools WhatlinkshereRelatedchangesUploadfileSpecialpagesPermanentlinkPageinformationCitethispageWikidataitem Print/export DownloadasPDFPrintableversion Languages العربيةDeutschفارسیFrançais한국어日本語Português中文 Editlinks
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