Nomination #13171 - 3D InCites

Lam's Syndion® is the best-in-class system for deep silicon etch, with advanced chamber technology enabling high performance with excellent productivity. LamResearchEdition2017LamResearch2017Edition.InLam’sSyndion®isthebest-in-classsystemfordeepsiliconetch,withadvancedchambertechnologyenablinghighperformancewithexcellentproductivity.Itsupportsarangeofcutting-edgeapplicationsforbothCMOSimagesensor(CIS)andthrough-siliconvia(TSV)markets.Keyrequirementsfordeepsiliconetchprocessesaretosimultaneouslydeliverhighetchrates,excellentuniformity(bothacross-waferanddepth),smoothsidewalls,andlowsidewalldamage.Lam’sSyndionetchsystemoffersdifferentiatedcapabilitiesthatallowfor:• Fastswitchingbetweenphasesoftherapidalternatingprocess(RAP),higheretchrates,betterdepthuniformity,andsmoothersidewalls• Advancedgasdistributionandcenter-to-edgetuningtoenhanceacross-waferuniformity• Advancedproductivity,leveragingLam’smarketleadershipintheconductoretchspace(e.g.,successofLam’sKiyoetchproductfamily)Withalibraryoftechnicalsolutions,ahistoryofcollaboration,andanactiveroadmaptosupportcustomers’moststringentrequirements,SyndionsetsbenchmarksforetchuniformityandproductivityattopCIScustomersforcriticaldeeptrenchisolation(DTI)etchandatmemorycustomersforTSVetch.WithleadingmarketshareforbothCISandTSVcriticaldeepsiliconetch,Lam’sSyndionisconsideredtobethelowest-riskdeepsiliconetchsolutionavailabletoday.Share