LAM Research 2300 Exelan Flex Dielectric Etch - CSI Semi

LAM Research 2300 Exelan Flex Dielectric Etch. Currently Configured for 300mm wafer size. Vintage: 2002. EQUIPMENT DETAILS: Tool Status: In Production. >>>>>>>>>>> Warning:Missingargument3foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument4foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument3foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument4foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument3foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument4foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument3foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument4foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument3foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument4foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument3foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 Warning:Missingargument4foravia_woocommerce_gallery_thumbnail_description()in/home/csisemi/public_html/wp-content/themes/enfold/config-woocommerce/config.phponline1251 EquipmentCategoriesParts SpareParts Mask Etch Etch/clean-plasmaprocessing reticle/photomaskequipment Coat/Develop Metrologyequipment other waferbonding ionimplanters Clean Chillers vacuumpumps CMPEquipment Etch/Clean-WetProcessing Metrology Sawing CMP Chiller Trim&Form Marking Evaporators Diffusionpumps Centrifuge MaskAligners Misc Molding SupportEquipment(Test) Tape&Reel DepositionEquipment DeviceHandler LithographyEquipment Lithography GasDelivery DeviceHandlet RapidThermalProcessing(RTPEquipment) PolysiliconEtch Etch/Ash/Clean-PlasmaProcessing SEM-CriticalDimension(CD)Measurement ReflowOvens ScreenPrinters VacuumPumps GasDelivery Reicle/PhotomaskEquipment Mis SolderPasteInspection BatchWaferProcessing Misx ReliabilityandQualification Etch/CleanWetprocessing RapidThermalProcessing Dispense Scrubbers Inspection Deposition MetalSeparator Drilling/RoutingMachines LEDWaferSaw MaterialsHandling MetrologyEquipment-Parts SMTLine Loaders AuctionSemiconductorEquipment SolarLine Drystripper WaferProbers Wire&DieBonders Tape&Reel Bonder WaferProbers FinishandMarkPackagingEquipment Grinding&Polishing Handlers Lasers DieAttachers Packaging WaferGrinding,Lapping&Polishing Laboratoryequipment Other Laboratoryequipment GasDelivery Coat/develop Coat/Develop Metrology Robots WaferAutomation/WaferEnvironment WaferAutomation/WaferEnvironment Stepper/Scanner AutomaticTestequipment(ATE) AutomatedTestEquipment(ATE) Pick&PlaceMemoryHandler SolderPasteInspection Pick&Place Pick&Place Dispense TELACT8 TELACT12 UVCure LAMResearch2300ExelanFlexDielectricEtch$0.00 Quantity Addtocart SKU:CSI0014889 Category:Uncategorized Tags:LAMResearchDielectricEtch,LAMResearchDielectricEtchforsale,UsedLAMResearchDielectricEtch Description ProductDescription LAMResearch2300ExelanFlexDielectricEtch  CurrentlyConfiguredfor300mmwafersize Vintage:2002 EQUIPMENTDETAILS: ToolStatus:InProduction. Originallyboughtasasinglechambersystem.(Toolisa4chamberconfiguration.) OriginalPOconfig: toincludethefollowing: 2300ExelanCFEPM,300mm 2300ExelanOptions-1600L/SEdwardsTurboPump PMISOValve:ChemrazRockerValve NSR5247_A:FLEXConfiguration 2300ExelanQuickCleanKit 2300ExelanPend.ValveKit 2300ExelanGasBox RegulatedInlet(perGasLine)-12GasConfiguration AeraFC-D980CUMFC– NSR5248_A:Line11100sccmO2/He(30%) DeltaStackingKit *2300Platform 3FOUP WIDSBTMRead UserInterface:SideandFrontMonitor SYSTEMUPSCIRCUITRY CABLE:TM-SUBPANEL,50FT SYSCALIBRATIONANDALIGNMENT TMNSR1:VTMDynamicAlignment 2004:two(2)additionalCuOxideetchchamberspurchased   [email protected]@gmail.com Tweet Relatedproducts PanasonicAVBInserter $0.00 AddtocartShowDetails MKSSurepowerQL651313.56MHz6500WRFGenerator. $0.00 AddtocartShowDetails DryPump $0.00 AddtocartShowDetails OPTOPBiologicalStereoMicroscope $0.00 AddtocartShowDetails KokusaiElectricCo.,Ltd.QuixaceIIDopedPolyVerticalLPCVDFurnaceLAMResearch2300ExelanFlex45DielectricEtch Scrolltotop