Pinnacle Plus+ Pulsed-DC Power Supplies - Advanced Energy

Advanced Energy Pinnacle® Plus+ power supplies provide all the advantages of a pulsed-DC solution for reactive processes — in an easily integrated package ... Products PlasmaPowerGenerators Pulsed-DCSystems PinnaclePlus+ PlasmaPowerGenerators PinnaclePlus+ Process-Proven,PulsedDCforSingle-MagnetronReactiveSputteringofThinDielectricFilms PinnaclePlus+generatorsdeliverDCpowerinapulsingconfigurationenablingreactivesputteringofextremelyuniform,high-qualitydielectricfilms. Chargeclearingduringthereversepulsepreventsarcsfromdeveloping Adjustableprocessthroughfrequencyanddutycyclecontrol Compactair-cooleddesignexpandableinprimary/secondaryconfigurations ContactUsAboutThisProduct Overview TechnicalSpecs Documents Service&Support Overview AdvancedEnergy Pinnacle® Plus+powersupplies providealltheadvantagesofapulsed-DCsolutionforreactiveprocesses—in aneasilyintegrated packagethat increasesprocessefficiency, reducescosts,andoffers superiorflexibilityandlatitude. CombiningstandardDCtechnologyand ourpatented pulsed-DCtechnology,thePinnaclePlus+powersupplies providehigherdepositionrates,morerepeatableperformance,andexceptionalfilmqualitycomparedtocomplicatedandexpensiveAC-powersolutions. Benefits Higherdepositionandyieldrates  Superiorfilmuniformityandquality  Reducedsubstratedamagecausedbyarcing  Excellentprocessflexibilityandlatitude  Repeatableperformance  Features Adjustablefrequencyrangeof5to350kHz  Variabledutycycleupto45%  Widevoltagerange—single-tapwideimpedancerange  Superiorarccontrol   Dualoutputavailableformulti-chamberproduction  Resources PinnaclePlusDataSheet ThePulsed-DCAdvantage MajorSemiconductorIndustryTrendsVideo Close ThinFilmPowerSupplyDecisionTree ViewAllPinnaclePlus+Resources Solutions Deposition FlatPanelDisplays GlassCoatings IndustrialCoatings SemiconductorManufacturing SolarPhotovoltaics Power SingleOutput 1.5kWHALO(highaccuracy,lowoutput),5 kW(single-anddual-outputmodels),10 kW  DualOutput 5/5 kW,independentlycontrolled  Voltage Upto800 VDCinasingle,widevoltagerange(notaps)  Frequency Adjustablefrom0 Hz(DC)to350 kHz Repeatability +/-0.1%ofratedpower Accuracy +/-1%ofsetpointor+/-0.2%offullratedpower(whicheverisgreater) CommunicationInterfaces Analog,RS-232/485, Profibus ACInput 208,400,and480 VACmodelsavailable Specificationsaresubjecttochangewithoutnotice. Notalloptionsandaccessoriesareavailable forallmodelsandconfigurations.Dimensionslistedgenerallyrefertostandardconfigurationsandmodulebodiesonly. Pleaseconfirmtechnicalspecificationsandcustomizationswithasalesrepresentative. AdvancedEnergyisnotresponsibleforerrorsoromissions. DataSheets PinnaclePlusDataSheet Brochures ThePulsed-DCAdvantage GlobalSupport&Services MaximizefabproductivityandcapitalequipmentROIwithworld-classsupportthrougheachproductlifecyclestage—fromstartuptolong-termoperation.Ourserviceofferingsarebasedonmorethanthreedecadesofprecisionpowerandapplicationsexpertise. LearnMore ApplicationsSupport&Consulting Acceleratetoolinstallationsandprocessdevelopmentprograms,oraddressspecificapplicationsconcernswithAdvancedEnergy'sdedicatedapplicationsconsultantsandengineeringstaff.Benefitfromon-sitereviews,analyses,andconsultations. LearnMore Warranties Decreasevariabilityinmaintenancecostsandprovideadditionalcostprotection.AdvancedEnergyofferswhole-boxextendedwarranties. LearnMore ProductSupport CallU.S.: +18004469167Asia: +862988741895China: 4008899130EMEA: +448000321546U.K.: 08000321546 EmailThinFilmSupportThermalProductSupportOtherTechnicalSupport ContactUs ThankYou YoumaynowviewanyresourceontheAdvancedEnergysite.Clickthebuttonbelowtoviewyourrequestedresource. ThankYou YoumaynowviewanyresourceontheAdvancedEnergysite.Clickthebuttonbelowtoviewyourrequestedresource.