TEL Announces Release of New Plasma Nitridation System ...
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- 1Impact of decoupled plasma nitridation of ultra-thin gate oxide ...
Download Citation | Impact of decoupled plasma nitridation of ultra-thin gate oxide on the perfor...
- 2氮化薄閘極氧化層之可靠度劣化研究| NCHU Institution ...
... Impact of decoupled plasma nitridation of ultra-thin gate oxide on the ... U. Ogawa, K. Shime...
- 3氮化薄閘極氧化層之可靠度劣化研究| NCHU Institution ...
... Impact of decoupled plasma nitridation of ultra-thin gate oxide on the ... U. Ogawa, K. Shime...
- 4國立交通大學機構典藏
Using OES to Predict Nitrogen Concentration for Plasma Nitrided Gate Oxide ... important technics...
- 5TEL Announces Release of New Plasma Nitridation System ...
SPA plasma nitridation can be combined with ultra-thin oxide formation using TEL's Fast Thermal P...
