Lam aims etch platform at all process steps on 200-, 300-mm ...

文章推薦指數: 80 %
投票人數:10人

Lam said its 2300 etch series has been used in the field for more than two years. The company cited an “Etch Tool Readiness” award for 300-mm systems received ... FREMONT, Calif.–Lam Research Corp. today announced what the company says it the industry's first etch platform se



請為這篇文章評分?